Opto-Acoustic Oscillator Using Silicon Mems Optical Modulator

We show operation of a silicon MEMS based narrow-band optical modulator with large modulation depth by improving the electro-mechanical transducer. We demonstrate an application of the narrowband optical modulator as both the filter and optical modulator in an opto-electronic oscillator loop to obtain a 236.22 MHz Opto-Acoustic Oscillator (OAO) with phase noise of -68 dBc/Hz at 1 kHz offset.