Two-dimensional phononic-photonic bandgap optomechanical crystal cavity

We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons and a two-dimensional pseudo-bandgap for near-infrared photons. An engineered defect in the crystal structure is used to localize optical and mechanical resonances in the bandgap of the planar crystal. Two-tone optical spectroscopy is used to characterize the cavity system, showing a large vacuum coupling rate of 220kHz between the fundamental optical cavity resonance at 195THz and a co-localized mechanical resonance at 9.3GHz.