Integrated cooling channels in position-sensitive silicon detectors

We present an approach to construct position-sensitive silicon detectors with an integrated cooling circuit. Tests on samples demonstrate that a very modest liquid flow very effectively cool the devices up to a power dissipation of over 10~W/cm$^2$. The liquid flow is found to have a negligible impact on the mechanical performance. A finite-element simulation predicts the cooling performance to an accuracy of approximately 10~\%.