Development of a new generation of 3D pixel sensors for HL-LHC

arxiv: 1612.00624 · v1 · pith:576KCCZVnew · submitted 2016-12-02 · ⚛️ physics.ins-det

Development of a new generation of 3D pixel sensors for HL-LHC

Gian-Franco Dalla Betta , Maurizio Boscardin , Giovanni Darbo , Roberto Mendicino , Marco Meschini , Alberto Messineo , Sabina Ronchin , DMS Sultan

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Nicola Zorzi

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classification ⚛️ physics.ins-det

keywords pixeldevelopmentgenerationsensorsaimedaspectscoversdesign

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This paper covers the main technological and design aspects relevant to the development of a new generation of thin 3D pixel sensors with small pixel size aimed at the High-Luminosity LHC upgrades.

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Development of a new generation of 3D pixel sensors for HL-LHC

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