Negative Capacitance Enables FinFET Scaling Beyond 3nm Node

A comprehensive study of the scaling of negative capacitance FinFET (NC-FinFET) is conducted with TCAD. We show that the NC-FinFET can be scaled to "2.1nm node" and almost "1.5nm node" that comes two nodes after the industry "3nm node," which has 16nm Lg and is the last FinFET node according to the International Roadmap for Devices and Systems (IRDS). In addition, for the intervening nodes, NC-FinFET can meet IRDS Ion and Ioff target at target-beating VDD. The benefits of negative capacitance (NC) include improved subthreshold slope (SS), drain-induced barrier lowering (DIBL), Vt roll-off, transconductance over Id (Gm/Id), output conductance over Id (Gd/Id), and lower VDD. Further scaling may be achieved by improving capacitance matching between ferroelectric (FE) and dielectric (DE).