Modulation of nanowire emitter arrays using micro-LED technology

A scalable excitation platform for nanophotonic emitters using individually addressable micro-LED-on-CMOS arrays is demonstrated for the first time. Heterogeneous integration by transfer-printing of semiconductor nanowires was used for the deterministic assembly of the infrared emitters embedded in polymer optical waveguides with high yield and positional accuracy. Direct optical pumping of these emitters is demonstrated using micro-LED pixels as source, with optical modulation (on-off keying) measured up to 150 MHz. A micro-LED-on-CMOS array of pump sources were employed to demonstrate individual control of multiple waveguide coupled nanowire emitters in parallel, paving the way for future large scale photonic integrated circuit applications.