Pith. sign in

REVIEW

UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT

Not yet reviewed by Pith; the record is open.

Re-run · record.json Download PDF Read on arXiv ↗

This paper has not been read by Pith yet. Machine review is queued; the pith claim, tier, and objections will appear here once it completes.

SPECIMEN: schema-true, not a live event

T0 review · schema-true

One-sentence machine reading of the paper's core claim.

pith:XXXXXXXX · record.json · timestamp

arxiv physics/0507046 v1 pith:ND2FPYPU submitted 2005-07-06 physics.atom-ph

K. Fahy , P. Dunne , L. Mckinney , G. O'sullivan , E. Sokell , J. White , A. Aguilar , J. M. Pomeroy
show 4 more authors
J. N. Tan B. Blagojevic E.-O. Lebigot (LKB - Jussieu) J. D. Gillaspy
This is my paper · ORCID
classification physics.atom-ph
keywords emissionxenoncomparedd-5pebiteuvlnistobtained
verification ladder T0 review T1 audit T2 compute T3 formal
0 comments
read the original abstract

Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with that from 4d-4f and 4p-4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of five could be gained in photon yield using the UTA rather than the 4d-5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon as an EUVL source material.

Discussion (0). Continue with ORCID to comment.

Pith tools