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Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

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arxiv 1712.01365 v1 pith:BNMECIA4 submitted 2017-10-20 physics.app-ph physics.optics

Zhiwei Fang , Ni Yao , Min Wang , Jintian Lin , Jianhao Zhang , Rongbo Wu , Lingling Qiao , Wei Fang
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Tao Lu Ya Cheng
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classification physics.app-phphysics.optics
keywords factorhighqualitydisksdouble-diskfabricationfemtosecondlaser
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We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

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