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Measurement of optical constants of TiN and TiN/Ti/TiN multilayer films for microwave kinetic inductance photon-number-resolving detectors

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arxiv 1802.06737 v1 pith:4A2PFIBI submitted 2018-02-19 physics.optics physics.app-ph

M. Dai , W. Guo , X. Liu , M. Zhang , Y. Wang , L. F. Wei , G. C. Hilton , J. Hubmayr
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J. Ullom J.Gao M. R. Vissers
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classification physics.opticsphysics.app-ph
keywords opticalrefractiveconstantsdetectorsfilmsindicesinductancekinetic
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We deposit thin titanium-nitride (TiN) and TiN/Ti/TiN multilayer films on sapphire substrates and measure the reflectance and transmittance in the wavelength range from 400 nm to 2000 nm using a spectrophotometer. The optical constants (complex refractive indices), including the refractive index n and the extinction coefficient k, have been derived. With the extracted refractive indices, we propose an optical stack structure using low-loss amorphous Si (a-Si) anti-reflective coating and a backside aluminum (Al) reflecting mirror, which can in theory achieve 100% photon absorption at 1550 nm. The proposed optical design shows great promise in enhancing the optical efficiency of TiN-based microwave kinetic inductance photon-number-resolving detectors.

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