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Lithium niobate micro-disk resonators of quality factors above 10^7

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arxiv 1806.00099 v1 pith:YQJ47HPB submitted 2018-05-16 physics.app-ph physics.optics

Rongbo Wu , Jianhao Zhang , Ni Yao , Wei Fang , Lingling Qiao , Zhifang Chai , Jintian Lin , Ya Cheng This is my paper
classification physics.app-phphysics.optics
keywords lithiumniobateabovefactorslnoimicrodiskqualityaround
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We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

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