A thermal bonding method for manufacturing Micromegas detectors

For manufacturing Micromegas detectors, the "bulk" method based on photoetching, was successfully developed and widely used in nuclear and particle physics experiments. However, the complexity of the method requires a considerable number of advanced instruments and processing, limiting the accessibility of this method for production of Micromegas detectors. In view of these limitations with the bulk method, a new method based on thermal bonding technique (TBM) has been developed to manufacture Micromegas detectors in a much simplified and efficient way without etching. This paper describes the TBM in detail and presents performance of the Micromegas detectors built with the TBM. The effectiveness of this method was investigated by testing Micromegas detector prototypes built with the method. Both X-rays and electron beams were used to characterize the prototypes in a gas mixture of argon and CO2 (7%). A typical energy resolution of ~16% (full width at half maximum, FWHM) and an absolute gain greater than 10^4 were obtained with 5.9 keV X-rays. Detection efficiency greater than 98% and a spatial resolution of ~65 {\mu}m were achieved using a 5 GeV electron beam at the DESY test-beam facility. The gas gain of a Micromegas detector could reach up to 10^5 with a uniformity of better than 10% when the size of the avalanche gap was optimized thanks to the flexibility of the TBM in defining the gap. Additionally, the TBM facilitates the exploration of new detector structures based on Micromegas owing to the much-simplified operation with the method.