High-harmonic generation from metasurfaces empowered by bound states in the continuum

The concept of optical bound states in the continuum (BICs) underpins the existence of strongly localized waves embedded into the radiation spectrum that can enhance the electromagnetic fields in subwavelength photonic structures. Early studies of optical BICs in waveguides and photonic crystals uncovered their topological properties, and the concept of quasi-BIC metasurfaces facilitated applications of strong light-matter interactions to biosensing, lasing, and low-order nonlinear processes. Here we employ BIC-empowered dielectric metasurfaces to generate efficiently high optical harmonics up to the 11th order. We optimize a BIC mode for the first few harmonics and observe a transition between perturbative and nonperturbative nonlinear regimes. We also suggest a general strategy for designing subwavelength structures with strong resonances and nonperturbative nonlinearities. Our work bridges the fields of perturbative and nonperturbative nonlinear optics on the subwavelength scale.