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arxiv: 2507.18599 · 2 revisions

Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

1. 2026-08-15 CONDITIONAL MODERATE v1.4.0-alltime-deepseek-medium novelty 6.0
   169439 ms 10649 in 16654 out 2026-08-15T18:10:35.946045+00:00
2. 2026-08-06 CONDITIONAL MODERATE v1.4.0-alltime-deepseek-medium novelty 6.0
   149902 ms 10669 in 14301 out 2026-08-06T14:32:41.668749+00:00