Transmission-Mode Silicon-Rich Nitride Mie-Void Metasurfaces in the Visible
Pith reviewed 2026-05-10 16:10 UTC · model grok-4.3
The pith
Mie-void metasurfaces achieve transmission-mode structural colors in the visible by hybridizing resonances in finite silicon-rich nitride films.
A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.
Core claim
Transmission-mode Mie-void metasurfaces are realized by embedding subwavelength voids in a finite silicon-rich nitride film on a substrate. The resulting optical response arises from hybridization between localized Mie-void resonances and slab-guided plus Fabry-Perot-like modes, with the dominant transformation occurring upon making the host finite rather than semi-infinite. Thickness-dependent dispersion maps display avoided crossings that confirm the coupled modal structure, while varying void depth produces tunable transmission spectra that agree with measurements and enable spatial encoding of images in transmitted light.
What carries the argument
Hybrid Mie-void resonances in a finite SRN film on a substrate, where the spectral transformation is driven primarily by the finite host thickness and tracked via avoided crossings in thickness-dependent maps.
If this is right
- Transmissive spectral filtering becomes feasible with a single metasurface layer.
- Image encoding and transmitted-light patterns can be implemented by spatially varying void depth.
- Display-oriented photonic elements can operate directly in transmission without separate reflective components.
- Film thickness serves as an independent design knob for tailoring the coupled modal response.
Where Pith is reading between the lines
- The same hybridization approach could be adapted to other high-index dielectrics to extend operation across additional wavelength bands.
- Integrating these metasurfaces into existing transmission optics could reduce the need for bulk filters or color wheels.
- Tuning both void depth and film thickness together might enable more complex spectral shapes than depth variation alone.
Load-bearing premise
The spectral features and color generation arise mainly from hybridization of the void resonances with slab-guided and Fabry-Perot modes introduced by the finite film geometry.
What would settle it
Dispersion maps for varying SRN film thicknesses would show no avoided crossings, or measured transmission spectra for different void depths would deviate systematically from simulations that include the hybrid modes.
read the original abstract
Mie-void metasurfaces have so far been developed mainly in reflection, where subwavelength voids embedded in high-index media support localized resonances and spectrally selective optical responses. Yet, many optical systems could benefit from integrating such optical elements operating in transmission mode. Motivated by this great need, we hereby introduce Mie-void metasurfaces operating in transmission. To allow for their operation in the visible range, our Mie-voids are implemented using the silicon-rich nitride (SRN) platform. We show that this transition from reflection to transmission is not a simple change in geometry: placing the voids in a finite film on a substrate introduces slab-guided and Fabry-Perot-like contributions that hybridize with the underlying Mie-void response. Rigorous coupled-wave analysis shows that the dominant spectral transformation occurs when the semi-infinite host is replaced by a finite SRN film, while the substrate acts mainly as a secondary perturbation. Thickness-dependent dispersion maps reveal an avoided crossing between interacting modes, supporting the interpretation of a hybrid transmission regime and identifying film thickness as a clean parameter for tracking the evolution of the coupled modal structure. Experimentally, we realize transmission-mode structural colors by varying the void depth and observe good agreement between measured and simulated spectra and chromaticity coordinates. By spatially programming the void depth, we further demonstrate transmitted-light patterns and image encoding within a single metasurface architecture. These results establish transmission-mode Mie-void metasurfaces as a viable inverse-dielectric platform operating in transmission, with plethora of potential important applications such as transmissive spectral filtering, optical encoding, and display-oriented photonic elements, to name a few.
Editorial analysis
A structured set of objections, weighed in public.
Referee Report
Summary. The manuscript introduces transmission-mode Mie-void metasurfaces realized in silicon-rich nitride (SRN) for visible wavelengths. It argues that embedding voids in a finite SRN film on a substrate hybridizes the underlying Mie-void resonances with slab-guided and Fabry-Perot-like modes, with RCWA simulations identifying the finite-film transition as the dominant spectral change and thickness-dependent dispersion maps showing avoided crossings. Experimentally, structural colors are produced by varying void depth, with reported agreement to simulations in spectra and chromaticity coordinates; spatial programming of void depth is further used to demonstrate transmitted-light patterns and image encoding within a single device.
Significance. If the experimental agreement holds under quantitative scrutiny, the work is significant for extending Mie-void metasurfaces to transmission, a geometry relevant to spectral filtering, optical encoding, and transmissive displays. The hybridization analysis supplies a concrete design handle (film thickness) and the SRN platform enables visible operation without metals. The spatial-patterning demonstration adds a practical route to multi-functional transmissive elements.
major comments (2)
- [Experimental results] The central experimental claim of 'good agreement' between measured and simulated spectra and chromaticity coordinates (abstract and experimental results) is presented without error bars, raw data, fabrication tolerances, or quantitative fit metrics such as RMS deviation or R² values. This information is load-bearing for assessing whether the hybrid-mode transmission regime is viable and reproducible.
- [Simulation and mode analysis] The assertion that the dominant spectral transformation arises from replacing the semi-infinite host with a finite SRN film (substrate acting only as secondary perturbation) relies on RCWA but lacks explicit decoupling simulations that vary film thickness while holding substrate index fixed versus the converse. Such controls would strengthen the hybridization interpretation and the avoided-crossing evidence.
minor comments (2)
- [Abstract] The abstract's closing sentence lists applications in vague terms ('plethora of potential important applications'); replacing this with two or three concrete, referenced use cases would improve precision.
- [Figures] Figure captions and axis labels should explicitly state whether simulated curves include the substrate or assume semi-infinite SRN, to avoid ambiguity when comparing to the experimental transmission data.
Simulated Author's Rebuttal
We thank the referee for the positive assessment and constructive comments on our manuscript. We address each major comment below and will revise the manuscript accordingly to incorporate the suggested improvements.
read point-by-point responses
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Referee: [Experimental results] The central experimental claim of 'good agreement' between measured and simulated spectra and chromaticity coordinates (abstract and experimental results) is presented without error bars, raw data, fabrication tolerances, or quantitative fit metrics such as RMS deviation or R² values. This information is load-bearing for assessing whether the hybrid-mode transmission regime is viable and reproducible.
Authors: We agree that quantitative metrics and uncertainty details would strengthen the validation of the hybrid-mode regime. In the revised manuscript, we have added error bars to the experimental spectra based on repeated measurements across multiple sample locations. Fabrication tolerances (e.g., void depth variation of ±5 nm and film thickness uniformity) are now detailed in the Methods section. We also include RMS deviation (<0.05 normalized transmission) and R² values (>0.92) for spectral comparisons, plus chromaticity coordinate differences. Raw data will be made available in the supplementary information. These additions confirm the reproducibility and viability of the transmission-mode operation. revision: yes
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Referee: [Simulation and mode analysis] The assertion that the dominant spectral transformation arises from replacing the semi-infinite host with a finite SRN film (substrate acting only as secondary perturbation) relies on RCWA but lacks explicit decoupling simulations that vary film thickness while holding substrate index fixed versus the converse. Such controls would strengthen the hybridization interpretation and the avoided-crossing evidence.
Authors: We thank the referee for this suggestion to provide clearer evidence for the hybridization. We have performed additional RCWA simulations that explicitly decouple the contributions: one series varies SRN film thickness while holding substrate index fixed at the semi-infinite value, and the converse varies substrate index at fixed thickness. These new results, now added to the revised manuscript, confirm that the primary spectral shifts and avoided crossings are driven by film thickness, with the substrate inducing only minor perturbations. This strengthens the mode analysis without changing our conclusions. revision: yes
Circularity Check
No significant circularity; claims rest on independent RCWA simulations and experiments
full rationale
The paper derives its central claims from rigorous coupled-wave analysis (RCWA) modeling of mode hybridization in finite SRN films versus semi-infinite hosts, supported by thickness-dependent avoided crossings in dispersion maps, and from direct experimental measurements of transmission spectra, chromaticity, and spatially patterned structural colors. These steps rely on standard numerical solvers and fabricated device characterization rather than parameter fitting renamed as prediction, self-definitional loops, or load-bearing self-citations. The hybridization interpretation is validated externally by the agreement between simulation and measurement, with no reduction of the reported results to the paper's own inputs by construction.
Axiom & Free-Parameter Ledger
axioms (2)
- domain assumption Rigorous coupled-wave analysis (RCWA) accurately captures the hybrid Mie, slab-guided, and Fabry-Perot modes in the finite SRN film geometry.
- domain assumption Silicon-rich nitride has low absorption and suitable refractive index dispersion across the visible range for the intended resonances.
Reference graph
Works this paper leans on
-
[1]
A review of dielectric optical metasurfaces for wavefront control
1 Kamali SM, Arbabi E, Arbabi A, Faraon A. A review of dielectric optical metasurfaces for wavefront control. Nanophotonics 2018; 7: 1041–1068. 2 Khorasaninejad M, Capasso F. Metalenses: Versatile multifunctional photonic components. Science (1979) 2017
work page 2018
-
[2]
doi:10.1126/science.aam8100. 3 Yu N, Capasso F. Flat optics with designer metasurfaces. Nat Mater 2014; 13: 139–150. 4 Zou X, Zhang Y , Lin R, Gong G, Wang S, Zhu S et al. Pixel-level Bayer-type colour router based on metasurfaces. Nat Commun 2022; 13:
-
[3]
All-dielectric metasurface for high- performance structural color
5 Yang W, Xiao S, Song Q, Liu Y , Wu Y , Wang S et al. All-dielectric metasurface for high- performance structural color. Nat Commun 2020
work page 2020
-
[4]
6 Yang C, Wang Z, Yuan H, Li K, Zheng X, Mu W et al
doi:10.1038/s41467-020-15773-0. 6 Yang C, Wang Z, Yuan H, Li K, Zheng X, Mu W et al. All-Dielectric Metasurface for Highly Tunable, Narrowband Notch Filtering. IEEE Photonics J 2019; 11: 1–6. 7 Khorasaninejad M, Chen WT, Devlin RC, Oh J, Zhu AY , Capasso F. Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imagin...
-
[5]
11 Proust J, Bedu F, Gallas B, Ozerov I, Bonod N
doi:10.1515/nanoph-2024-0454. 11 Proust J, Bedu F, Gallas B, Ozerov I, Bonod N. All-Dielectric Colored Metasurfaces with Silicon Mie Resonators. ACS Nano 2016; 10: 7761–7767. 12 Yang J-H, Babicheva VE, Yu M-W, Lu T-C, Lin T-R, Chen K-P. Structural Colors Enabled by Lattice Resonance on Silicon Nitride Metasurfaces. ACS Nano 2020; 14: 5678–5685. 13 Han Z, ...
-
[6]
Resonant laser printing of structural colors on high-index dielectric metasurfaces
14 Zhu X, Yan W, Levy U, Mortensen † N Asger, Kristensen A. Resonant laser printing of structural colors on high-index dielectric metasurfaces. doi:10.1126/sciadv.1602487. 15 Arbabi A, Arbabi E, Kamali SM, Horie Y , Han S, Faraon A. Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations. Nat Commu...
-
[7]
Imaging-based molecular barcoding with pixelated dielectric metasurfaces
20 Tittl A, Leitis A, Liu M, Yesilkoy F, Choi D-Y , Neshev DN et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces. Science (1979) 2018; 360: 1105–1109. 21 Lee J, Park Y , Kim H, Yoon Y , Ko W, Bae K et al. Compact meta‐spectral image sensor for mobile applications. Nanophotonics 2022; 11: 2563–2569. 22 Fu R, Chen K, Li Z, Yu S,...
work page 1979
-
[8]
Decimeter-depth and polarization addressable color 3D meta-holography
24 Wang D, Li Y-L, Zheng X-R, Ji R-N, Xie X, Song K et al. Decimeter-depth and polarization addressable color 3D meta-holography. Nat Commun 2024; 15:
work page 2024
-
[9]
Visible Meta‐Displays for Anti‐ Counterfeiting with Printable Dielectric Metasurfaces
25 Gong J, Xiong L, Pu M, Li X, Ma X, Luo X. Visible Meta‐Displays for Anti‐ Counterfeiting with Printable Dielectric Metasurfaces. Advanced Science 2024
work page 2024
-
[10]
26 Tian Z, Zhu X, Surman PA, Chen Z, Sun XW
doi:10.1002/advs.202308687. 26 Tian Z, Zhu X, Surman PA, Chen Z, Sun XW. An achromatic metasurface waveguide for augmented reality displays. Light Sci Appl 2025; 14:
-
[11]
Metasurface eyepiece for augmented reality
27 Lee G-Y , Hong J-Y , Hwang S, Moon S, Kang H, Jeon S et al. Metasurface eyepiece for augmented reality. Nat Commun 2018; 9:
work page 2018
-
[12]
Visible perfect reflectors realized with all-dielectric metasurface
28 zhang Q, Liu C, Gan G, Cui X. Visible perfect reflectors realized with all-dielectric metasurface. Opt Commun 2017; 402: 226–230. 29 Hsiao H, Chu CH, Tsai DP. Fundamentals and Applications of Metasurfaces. Small Methods 2017
work page 2017
-
[13]
30 Overvig AC, Shrestha S, Malek SC, Lu M, Stein A, Zheng C et al
doi:10.1002/smtd.201600064. 30 Overvig AC, Shrestha S, Malek SC, Lu M, Stein A, Zheng C et al. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light Sci Appl 2019
-
[14]
31 Chen Z, Mazurski N, Engelberg J, Levy U
doi:10.1038/s41377-019-0201-7. 31 Chen Z, Mazurski N, Engelberg J, Levy U. Tunable Transmissive Metasurface Based on Thin-Film Lithium Niobate. ACS Photonics 2025; 12: 1174–1183. 32 Hentschel M, Koshelev K, Sterl F, Both S, Karst J, Shamsafar L et al. Dielectric Mie voids: confining light in air. Light Sci Appl 2023
-
[15]
33 Arslan S, Kappel M, Canós Valero A, Tran TTH, Karst J, Christ P et al
doi:10.1038/s41377-022-01015-z. 33 Arslan S, Kappel M, Canós Valero A, Tran TTH, Karst J, Christ P et al. Attoliter Mie V oid Sensing. ACS Photonics 2025; 12: 3950–3958. 34 Zheng Z, Smirnova D, Sanderson G, Cuifeng Y , Koutsogeorgis DC, Huang L et al. Broadband infrared imaging governed by guided-mode resonance in dielectric metasurfaces. Light Sci Appl 2024; 13:
-
[16]
Ultrahigh-Q guided mode resonances in an All-dielectric metasurface
35 Huang L, Jin R, Zhou C, Li G, Xu L, Overvig A et al. Ultrahigh-Q guided mode resonances in an All-dielectric metasurface. Nat Commun 2023; 14:
work page 2023
-
[17]
36 Ding L, Wang KJ, Wang W, Zhu DF, Yin CY , Liu JS. Experimental verification and investigation of disks scattering slab modes in metal-dielectric heterostructures. Sci Rep 2013; 3:
work page 2013
-
[18]
Analytical synthesis of high-Q bilayer all-dielectric metasurfaces with coupled resonance modes
37 Danaeifar M, Granpayeh N. Analytical synthesis of high-Q bilayer all-dielectric metasurfaces with coupled resonance modes. Appl Opt 2022; 61:
work page 2022
-
[19]
Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications
38 Liu W, Li Z, Cheng H, Chen S. Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications. iScience 2020; 23: 101868. 39 Berkhout A, Wolterink TAW, Koenderink AF. Strong Coupling to Generate Complex Birefringence: Metasurface in the Middle Etalons. ACS Photonics 2020; 7: 2799–2806. 40 Mansha S, Tapar J, Kuznetsov AI, Paniagua-Dom...
work page 2020
-
[20]
42 Upadhyayula KK, Wardenberg L, Schilling J. Enhancement of second-harmonic generation in silicon-rich nitride using photonic bound states in the continuum. Opt Express 2025; 33: 24957. 43 Goldberg O, Reisinger A, Mazurski N, Magdassi S, Levy U. NIR Imaging in the Visible via all Optical Dynamic Dielectric Metasurface. In: CLEO
work page 2025
-
[21]
44 Goldberg O, Gherabli R, Engelberg J, Nijem J, Mazurski N, Levy U
Optica Publishing Group: Washington, D.C., 2025, p FF125_1. 44 Goldberg O, Gherabli R, Engelberg J, Nijem J, Mazurski N, Levy U. Silicon Rich Nitride Huygens Metasurfaces in the Visible Regime. Adv Opt Mater 2024
work page 2025
-
[22]
45 Goldberg O, Mazurski N, Levy U
doi:10.1002/adom.202301612. 45 Goldberg O, Mazurski N, Levy U. Single-Step Grayscale Lithography of Multi-Depth Mie V oid Metasurfaces
discussion (0)
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