Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
classification
⚛️ physics.plasm-ph
keywords
currentplasmawaveformasymmetriccoupleddriveninductivelytriangular
read the original abstract
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on plasma characteristics, collision processes, and the electron velocity distribution function driven by asymmetric triangular waveform current.
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