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Integrity report for Self-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled Plasma

A machine-verified record of the checks Pith has run against this paper: detector runs, findings, signed bundle events, and canonical identifiers.

arXiv:1506.05167 · pith:2015:4ZYLBQ26CN4S6Q4KFCT7TEZ34L

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Last checked

Paper page arXiv integrity.json bundle.json

Detector runs

Findings

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Signed record

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