Fine tuning of micropillar cavity modes through repetitive oxidations

Repetitive wet thermal oxidations of a tapered oxide aperture in a micropillar structure are demonstrated. After each oxidation step the confined optical modes are analyzed at room temperature. Three regimes are identified. First, the optical confinement increases when the aperture oxidizes towards the center. Then, the cavity modes shift by more than 30 nm, when the taper starts to oxidize through the center, leading to a decrease in the optical path length. Finally, the resonance frequency levels o?f, when the aperture is oxidized all the way through the micropillar, but confined optical modes with a high quality factor remain. This repetitive oxidation technique therefore enables precise control of the optical cavity volume or wavelength.