Line-field Coherent Sensing with LED Illumination

Celalettin Yurdakul; David S. Millar; Hassan Mansour; Keisuke Kojima; Kieran Parsons; Philip V. Orlik; Pu Wang; Toshiaki Koike-Akino

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Line-field Coherent Sensing with LED Illumination

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arxiv 2202.12161 v1 pith:AYLZLQFJ submitted 2022-02-24 physics.optics physics.ins-det

Celalettin Yurdakul , David S. Millar , Hassan Mansour , Pu Wang , Keisuke Kojima , Toshiaki Koike-Akino , Kieran Parsons , Philip V. Orlik This is my paper · ORCID

classification physics.opticsphysics.ins-det

keywords illuminationline-fieldaccuracyachievedallowscmoscoherentcomplementary

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We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets.

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