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Paper Citation Record · LEDGER

2D PZT MEMS Resonant Scanner Using a Three-Mask Process

As of 8 August 2026, this Paper Citation Record lists 54 of 54 outbound references and 0 inbound Pith citation observations for arXiv:2505.24566.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2505.24566 v1

Coverage vector

measured 54 of 54 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-07T12:22:04.684467Z

measured 54 of 54 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-08T06:32:00.761636+00:00

measured 0 of 0 inbound itemization

Pith citing papers itemized under the disclosed page cap.

Source: paper_references, paper_reference_links

measured 0 of 1 external citation measurements

A source-named dated measurement, never combined with another source.

Source: cited_works

Reference resolution

54 of 54 outbound references displayed

  • verified exact0
  • verified fuzzy47
  • unresolved5
  • parse uncertain2
  • malformed identifier0
  • metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation 107f6ce8-8517-458b-a3c2-c2c1a750e2dd · outbound

This paper cites Journal of Microelectromechanical Systems, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Microelectromechanical Systems, 2024

Reference 1

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.525954Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:21:59.606924Z digest=sha256:441a827ca2d84059c3f2a47deb4631e3322429d1d6f453a9be881febf60c4255

Observation d81d9cb9-9084-46f4-96f2-283bb1ef4f72 · outbound

This paper cites Zolfaghari, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Zolfaghari, and H

Reference 2

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.382548Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:21:59.688538Z digest=sha256:8fa42729a9a0fe6d8722781026efe62da104e9b5b621cf5750cc75c4870732bb

Observation 88d4c027-dd5a-4518-a087-9d69e6624047 · outbound

This paper cites Photonics Research, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Photonics Research, 2024

Reference 3

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.227601Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:21:59.798890Z digest=sha256:01f34222061d9163277ec50d933040252899f4612394bc278e789e238a4a9e14

Observation f5208c17-3643-42d9-8359-3896d7455eb2 · outbound

This paper cites Watkins, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Watkins, and H

Reference 4

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.100202Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:21:59.887397Z digest=sha256:7241807b7ce69446ee4769e6a38a94c641fc8d9351681bda3f4fd54ab4df7200

Observation 67c5884b-2448-4f43-beef-c2898e1694af · outbound

This paper cites IEEE Sensors Journal, 2021.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process IEEE Sensors Journal, 2021

Reference 5

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.917454Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:21:59.980659Z digest=sha256:db34d1cbbfcb59a3e05eda29843a8e76a8edebe2cf527011a98a7f2ba30f44cd

Observation 7bedb62d-e556-4c6c-9fe3-7593091ea337 · outbound

This paper cites Optics & Laser Technology, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics & Laser Technology, 2024

Reference 6

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.705761Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.094734Z digest=sha256:45568e8ed08d66da67eea76c0dc009430e32a2da77faf6b828d6617adb6412a0

Observation f17179ca-39b8-487b-941a-288212b1fc3a · outbound

This paper cites Optics and Lasers in Engineering, 2022.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics and Lasers in Engineering, 2022

Reference 7

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.515819Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.200180Z digest=sha256:89fd37448c66edfa61b883a500720cefe3ee3ad3943e2df60d58d94a91356973

Observation 37968876-0525-4797-88d5-3f87a6cb18a5 · outbound

This paper cites Micromachines, 2022.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Micromachines, 2022

Reference 8

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.331703Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.281861Z digest=sha256:73704a826a3917297e2413e23c2d69e78de9d023071decf66691c84fa5db8555

Observation cdd51588-2d55-4f26-bf40-c473f2a35fd7 · outbound

This paper cites Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

Reference 9

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.177695Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.376312Z digest=sha256:7c4e032adf62d0cb618544d67d26ef1725e4f549990b80ae7dbbf2c31b673ed6

Observation d68e57de-f568-4d57-a799-0af4570c9951 · outbound

This paper cites Journal of Micromechanics and Microengineering,.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering,

Reference 10

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.959312Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.444159Z digest=sha256:7c1d58d3518d91dcd51cb82ba277b26b51bd4b6da67914ac5c4809d45e39e4ae

Observation 28d70b07-823a-4276-a763-983088461e50 · outbound

This paper cites Journal of Micromechanics and Microengineering, 2023.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2023

Reference 11

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.646287Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.635084Z digest=sha256:03770b31e4cb46d62583139f30955f59e1065391cbe1cc4fce3ef7eddd2ea023

Observation 979bedca-9afd-4849-97dd-138b9909ed2f · outbound

This paper cites P‐44: A Smart Eye Tracking System Based on Linear Array Sensors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process P‐44: A Smart Eye Tracking System Based on Linear Array Sensors

Reference 12

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.458604Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.767474Z digest=sha256:6911043ab442ce916f788db6cec7b788b4a70044f940a341941f6bf1fcb69e3e

Observation b8fea0a2-a4ff-4218-9226-77b6089dbe48 · outbound

This paper cites 3.8× 3.8 mm 2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 3.8× 3.8 mm 2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

Reference 13

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.278508Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.834327Z digest=sha256:101dc1d733917b03e7d1a26992da98931fc71ab1814744bcafc3d535f9658445

Observation 9ee9358a-ac5c-44cd-8c23-389ccb3e6fc7 · outbound

This paper cites International Journal of Imaging Systems and Technology, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process International Journal of Imaging Systems and Technology, 2024

Reference 14

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.122640Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.940168Z digest=sha256:ab0502c591fd4b585a26fa8fc70abbd7b59ee0f40057f3747d34489a70a2b01c

Observation 949815c5-1f5b-44a8-b025-df450ee893a1 · outbound

This paper cites IEEE Sensors Journal, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process IEEE Sensors Journal, 2024

Reference 15

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.890340Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.040327Z digest=sha256:b4ab805b6f02cb1b3387642739fbe24def432f2c977a1201d1f345bdc4484353

Observation d0757027-b9e7-48a9-8bc8-6a3cb7a91202 · outbound

This paper cites Microsystems & Nanoengineering, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Microsystems & Nanoengineering, 2024

Reference 16

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.702195Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.131265Z digest=sha256:aae899d28bcf14e9896827201c0005c80dd91821387da010914a1f5ff679121b

Observation a5f44c17-4e31-4275-a475-3906a586a44b · outbound

This paper cites International Journal of Optomechatronics, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process International Journal of Optomechatronics, 2024

Reference 17

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.582804Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.192067Z digest=sha256:0d9f3bebb9eab6946228f5a25d68a747cb5a8bc13e35d240c74ebd1f7f05396f

Observation be84d95b-be18-4c52-b310-40017d09094c · outbound

This paper cites Kasturi, and V.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Kasturi, and V

Reference 18

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.426459Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.256782Z digest=sha256:1580727437252ad82b3edefaed877291eb6e347e25ddc509b072765295f134c5

Observation 73aa80e1-515a-4f1e-ad8e-bbfb023101ed · outbound

This paper cites Yamaguchi, and T.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Yamaguchi, and T

Reference 19

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.332167Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.305539Z digest=sha256:92a82367348e720a500257187400e2283458169b56d7ff56e37b34ec2e8567e4

Observation 5694e3d6-12f4-4cf1-85c0-afe37b637972 · outbound

This paper cites Laser beam scanning based AR-display applying resonant 2D MEMS mirrors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Laser beam scanning based AR-display applying resonant 2D MEMS mirrors

Reference 20

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.213237Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.433360Z digest=sha256:d15c8eea45ee7ca3f28ad5e655aeebdeef8cdb57dd0236fdf1a6e0e550a5fe8e

Observation fd19aa5e-3f45-4249-b611-cfc4f24ee8e8 · outbound

This paper cites Procedia Engineering, 2010.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Procedia Engineering, 2010

Reference 21

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.986542Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.519609Z digest=sha256:937d0afa2aeb05ac07bcf398c96583cf3101dbb2b6970145b418d780231d1277

Observation c75aee8c-5aaf-4cec-b52c-e5b04b6c6847 · outbound

This paper cites Baran, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Baran, and H

Reference 22

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.739570Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.597796Z digest=sha256:25614b832eb298653b1f9729f59078429a45e9b5d8c111ef489ade7fcc7fb3ec

Observation f6824983-f9d8-4e20-a555-c0f362b01195 · outbound

This paper cites Pribošek, and M.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Pribošek, and M

Reference 23

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.463325Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.699828Z digest=sha256:d38e1db4629eed744b329b189f893276e5d378d467d7acf9a887cb25324bba7a

Observation 69706046-301c-4abb-9502-937eec91fe8c · outbound

This paper cites Journal of Micromechanics and Microengineering, 2020.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2020

Reference 24

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.020292Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.791805Z digest=sha256:75158b4ddafb390c5f15353784cabb3eb32e881347b0a526d45c665e5349e406

Observation 040a064e-83c9-4891-ad2e-e3cf78e1a0e3 · outbound

This paper cites Modeling electrostatic MEMS actuator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Modeling electrostatic MEMS actuator

Reference 25

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.774593Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:01.901796Z digest=sha256:73b3a5e68bf9060d0ba322b5b49d547ca1f776ad698033431f3fd9b6a6e9c510

Observation 2eb6ef6a-48a5-4d17-901f-e61ff1412421 · outbound

This paper cites Optics and Lasers in Engineering, 2013.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics and Lasers in Engineering, 2013

Reference 26

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.426537Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.018689Z digest=sha256:e54a7ce622e7a1173f2b4d9988b2298b59684ab1befb547721e5f221e8331fba

Observation ebfa03b9-7178-480e-b306-0ff237ba406b · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 27

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:09.225925Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.096556Z digest=sha256:fc3244c8c20c6690e852eec2351346a1004fa7d33900961da65767d63207481d

Observation 668d71ca-9375-49eb-ae6e-06e5376a18ca · outbound

This paper cites Journal of Micromechanics and Microengineering, 2018.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2018

Reference 28

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.146147Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.212937Z digest=sha256:f9fb246b309c98dc468d49b0652e7d7742a117e1aaf44b144de032b252a1e318

Observation ac4f0c3a-d43b-4f42-b182-3cfc27859b07 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 29

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:09.028156Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.314550Z digest=sha256:6317050c5a3a49ee1f2aa228a4ab3efea7a010ed2dd1db82cb73e58b25b62537

Observation 3df55bb2-a21e-4082-aa15-e195dbb13f2b · outbound

This paper cites and S.-S.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process and S.-S

Reference 30

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.884109Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.400692Z digest=sha256:0c69dda0af8d40c45751cb7311c83fa824eb9027964c030bbd7d705effa5954a

Observation 3d721e9d-3552-4f14-bb69-31ac275cf1ed · outbound

This paper cites Mirzajani, and M.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Mirzajani, and M

Reference 31

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.570909Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.614149Z digest=sha256:3068d8d5e060e04435fe40a240d378a27285cb8c261d3424d53e4fe193c0ddd3

Observation 00898e78-a48f-46f7-ade8-55e8dceba063 · outbound

This paper cites An acoustic piezoelectric ring-shape Lamb wave MEMS resonator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process An acoustic piezoelectric ring-shape Lamb wave MEMS resonator

Reference 32

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.463341Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.687595Z digest=sha256:2d2909717b194cf08ddccc59c72e4ec189c8242d57bfaccba548b56e61bdb89e

Observation 5fc54886-1b64-4823-9a82-e1f13470f5dc · outbound

This paper cites Sensors and Actuators A: Physical, 2025.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Sensors and Actuators A: Physical, 2025

Reference 33

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.286771Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.774086Z digest=sha256:0aac41072fb2d95c1814b4e56eb5343051514012d508a01a624bb86208e13ff9

Observation 12956815-5bd5-4792-9988-4b0a2119bfaa · outbound

This paper cites Lu, and K.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Lu, and K

Reference 34

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.116100Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.856269Z digest=sha256:51d46de9c921fad1001d08f6882e7905b6fda549ce5bb3194657c579b4135912

Observation 12851d61-e5d9-4960-b9cb-421860a14f4f · outbound

This paper cites Wang, and P.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Wang, and P

Reference 35

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.928163Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.922986Z digest=sha256:9bdf18013821cd95e1389b56bb1907e0155d78018d373d02a8763773245e6a99

Observation 3d67d6b3-791c-4bc5-9637-45288bc9b6fc · outbound

This paper cites 2D micro scanner actuated by sol-gel derived double layered PZT.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 2D micro scanner actuated by sol-gel derived double layered PZT

Reference 36

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.812428Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.022821Z digest=sha256:b54fb0ab802a647faeb17ac89b3e1ae01023af22ecff3620050dbcb83b597b85

Observation 4cd75d19-96a4-4f88-bdb5-7a45b8f795fa · outbound

This paper cites Integrated Ferroelectrics, 2006.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Integrated Ferroelectrics, 2006

Reference 37

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.656473Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.102189Z digest=sha256:ee1b59b97e08a7b8fb7d7adce0e2fdfa65a87eb2cb9ea3a20b7281be98a8071b

Observation ac5c119b-4cb3-4b2b-877e-326b8ebfcb4a · outbound

This paper cites Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Reference 38

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.463727Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.212194Z digest=sha256:0667aa4cf896fee9481b6f2f4c5f9225d8a2e7740ca616c4eaa8e25e844b7b09

Observation c36c4709-bab9-4189-9511-3b79d0074a67 · outbound

This paper cites A two-axis piezoelectric tilting micromirror with a newly developed PZT- meandering actuator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process A two-axis piezoelectric tilting micromirror with a newly developed PZT- meandering actuator

Reference 39

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.300742Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.327743Z digest=sha256:17a7683a3557c556b915cc9a06388dcfcf5e01cc3672694d2ca2d7de744f96e2

Observation 015c4766-a7f1-4040-9103-9fc66563306c · outbound

This paper cites A combination of fast resonant mode and slow static deflection of SOI- PZT actuators for MEMS image projection display.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process A combination of fast resonant mode and slow static deflection of SOI- PZT actuators for MEMS image projection display

Reference 40

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.145721Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.438497Z digest=sha256:8568b16396543f93cddf9b342c9389f299bc604ce98356324923d3e4a39fed3b

Observation 11273c27-af6c-4f83-ad67-2a2a7f0f9453 · outbound

This paper cites Journal of microelectromechanical systems, 2012.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of microelectromechanical systems, 2012

Reference 41

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.016285Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.542317Z digest=sha256:07691d49aa5feb5158ef502c825d4ee6a8d0ffd54c8db57fa18482dc5e4d5a32

Observation 09425845-d76b-4458-81ac-3dc328fe2adb · outbound

This paper cites Resonant PZT MEMS scanners with integrated angle sensors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Resonant PZT MEMS scanners with integrated angle sensors

Reference 42

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.872547Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.656391Z digest=sha256:8bcff6d500fc90a21d8e85477416d793bb635725a1032d82814f04cd10ec9aab

Observation 657caf07-f9ad-4dde-9c94-3152792ffa08 · outbound

This paper cites Journal of Materials Research, 2011.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Materials Research, 2011

Reference 43

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.694255Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.771711Z digest=sha256:dbe1e0e6e1c5abf36b04ca92c63fa0d488e6041d6880eff26d226cb34328d701

Observation 1e092b34-bcff-47b1-b39a-471e11711540 · outbound

This paper cites Analysis of the nonlinear response of piezo-micromirrors with the harmonic balance method.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Analysis of the nonlinear response of piezo-micromirrors with the harmonic balance method

Reference 44

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.528529Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.884663Z digest=sha256:aff47a1e054f0c403863ec0a1f9d3c608692bd5aa94f5f739af2a3b2fab389d0

Observation fa91ba75-a6b6-4a9a-b6cc-da6f121dea1e · outbound

This paper cites Optics Express, 2023.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics Express, 2023

Reference 45

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.361052Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:03.947761Z digest=sha256:c03e7ed2d015c169bb1c5b9590956fd537d9f7b0b90916fce32a0d694bfc3d2c

Observation 4e530c07-12ab-4ac9-81d3-29a626f1b525 · outbound

This paper cites Journal of Micromechanics and Microengineering, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2024

Reference 46

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.170579Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.068585Z digest=sha256:9b0544fac678cf5e0aef2c494564878fcf15c352b754962277ed665a11b57e55

Observation 46bda414-3c0b-4119-a42b-1cd0f9e367fc · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 47

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.994865Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.175549Z digest=sha256:5f1c029b2636335c609f51319defa8cb58f96f70d76ff402a04590c3f716b6cb

Observation 485ed5d4-a509-4c2b-a294-f8cd3d5e5115 · outbound

This paper cites Resonant body transistors in standard CMOS technology.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Resonant body transistors in standard CMOS technology

Reference 48

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:05.822377Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.274613Z digest=sha256:49b4e311c3971a5151d9f7a0fbedb6faa389f836482a923f196a68d02076b158

Observation 5168daa4-d8d8-4be7-bc23-05158e1436dd · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 49

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.602131Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.384919Z digest=sha256:50a4b64773fc61058ffb49e900e4f35cd5a5fa08f29834a37b1d256eb199b957

Observation 6608f30a-1be8-4730-b8f4-078e95950278 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 50

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.317356Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.484654Z digest=sha256:a864fb63aad2dff20b46f0c6a5b5d0bd8d49db7743660429b3ceb92eba570e12

Observation 03651cdc-1eb7-49e6-bbb2-8860ef598e45 · outbound

This paper cites Applied Spectroscopy Reviews, 2025.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Applied Spectroscopy Reviews, 2025

Reference 51

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:05.108827Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.568918Z digest=sha256:dc1c5852f9bb6e20ae2f8f216c60c178a9a5243fdf2204e8527e0467f75167db

Observation a327d22c-fdfa-49df-a5be-db97eab76fca · outbound

This paper cites Wagner, and P.A.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Wagner, and P.A

Reference 52

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:04.927594Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:04.684467Z digest=sha256:edb6db46d9a5377f6308ed16e5df8ab4dac28f891295edd586d5c77ff687f649

Observation e0202334-8852-48d7-bd10-e9b7f1531f8b · outbound

This paper cites 12589-12605.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 12589-12605

Reference 2020

Resolution
parse uncertain
raw_fallback, observed 2026-08-07T12:22:08.695560Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:02.504187Z digest=sha256:c1a7ca65add85efe7424ccd4068060efca1caa629714359434d0da6f4b4fe1d9

Observation 6365ef98-3c05-4249-9049-74ff386b4f24 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 2024

Resolution
parse uncertain
raw_fallback, observed 2026-08-07T12:22:12.796043Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-08T06:32:00.761636+00:00.

source=pdf_text observed=2026-08-07T12:22:00.537822Z digest=sha256:d33846dc11c7b09716266d361acc3526496198b1860b279a326150cd7c7f1095

Pith citing papers

No inbound Pith citation observations are available.