Pith. sign in

Paper Citation Record · LEDGER

2D PZT MEMS Resonant Scanner Using a Three-Mask Process

As of 10 August 2026, this Paper Citation Record lists 54 of 54 outbound references and 0 inbound Pith citation observations for arXiv:2505.24566.

A citation records a reference. It does not transfer a finding from one paper to another.

pith.paper-citation-record.v1
2505.24566 v1

Coverage vector

measured 54 of 54 reference resolution

Typed states for the displayed outbound observations.

Source: paper_references, paper_reference_links, observed 2026-08-07T12:22:04.684467Z

measured 54 of 54 standing notices

One-hop event checks from named stored sources.

Source: scholarly_work_events, retraction_status_cache, observed 2026-08-10T06:31:04.303077+00:00

measured 0 of 0 inbound itemization

Pith citing papers itemized under the disclosed page cap.

Source: paper_references, paper_reference_links

measured 0 of 1 external citation measurements

A source-named dated measurement, never combined with another source.

Source: cited_works

Reference resolution

54 of 54 outbound references displayed

  • verified exact0
  • verified fuzzy47
  • unresolved5
  • parse uncertain2
  • malformed identifier0
  • metadata mismatch0

External citation measurements

No source-named external measurement is stored.

Outbound references

Observation 107f6ce8-8517-458b-a3c2-c2c1a750e2dd · outbound

This paper cites Journal of Microelectromechanical Systems, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Microelectromechanical Systems, 2024

Reference 1

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.525954Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:21:59.606924Z digest=sha256:11339d4d40d12688994b3c9486a97574f2a1935127636fcad91500b6229e8b00

Observation d81d9cb9-9084-46f4-96f2-283bb1ef4f72 · outbound

This paper cites Zolfaghari, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Zolfaghari, and H

Reference 2

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.382548Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:21:59.688538Z digest=sha256:f1e175c86b834fb3009250c2326a80531d27d5c6698fc76fbce3926f802337ce

Observation 88d4c027-dd5a-4518-a087-9d69e6624047 · outbound

This paper cites Photonics Research, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Photonics Research, 2024

Reference 3

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.227601Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:21:59.798890Z digest=sha256:185522de1c8e0a3966e802d05510a1fa63e3a224b0ece5c16874fe8918e113eb

Observation f5208c17-3643-42d9-8359-3896d7455eb2 · outbound

This paper cites Watkins, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Watkins, and H

Reference 4

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:14.100202Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:21:59.887397Z digest=sha256:5587138a5c564e794d64a3aac6a1c52a89dc9bbaccf433ff5adcafd0d08f4e6d

Observation 67c5884b-2448-4f43-beef-c2898e1694af · outbound

This paper cites IEEE Sensors Journal, 2021.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process IEEE Sensors Journal, 2021

Reference 5

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.917454Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:21:59.980659Z digest=sha256:e9f0b19e316be3fd280389ffa54bbee1ebfb70f160cdc521079a45a6513d3887

Observation 7bedb62d-e556-4c6c-9fe3-7593091ea337 · outbound

This paper cites Optics & Laser Technology, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics & Laser Technology, 2024

Reference 6

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.705761Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.094734Z digest=sha256:79ccf544cbbd62d5b2ffb36c1075d953d8f6c446468bac2f985377f62aacfb77

Observation f17179ca-39b8-487b-941a-288212b1fc3a · outbound

This paper cites Optics and Lasers in Engineering, 2022.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics and Lasers in Engineering, 2022

Reference 7

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.515819Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.200180Z digest=sha256:8e80d5b1b99306973afc879c2f4b5211f1c06d9cc02185fb8de1e4c91a11bbb4

Observation 37968876-0525-4797-88d5-3f87a6cb18a5 · outbound

This paper cites Micromachines, 2022.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Micromachines, 2022

Reference 8

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.331703Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.281861Z digest=sha256:654ab97fcc50b906d09eb31010f6841549abb97b4ea4af0281334c8b5840b63a

Observation cdd51588-2d55-4f26-bf40-c473f2a35fd7 · outbound

This paper cites Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs

Reference 9

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:13.177695Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.376312Z digest=sha256:a29270df79087c57d1e58463f7dfcaecf658ac86af1c1ed9cca87585917e1e41

Observation d68e57de-f568-4d57-a799-0af4570c9951 · outbound

This paper cites Journal of Micromechanics and Microengineering,.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering,

Reference 10

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.959312Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.444159Z digest=sha256:6b15fdc21e124fee76fbb58d66165b90b3d17dbbfbc109bc030bda1c6f998635

Observation 28d70b07-823a-4276-a763-983088461e50 · outbound

This paper cites Journal of Micromechanics and Microengineering, 2023.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2023

Reference 11

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.646287Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.635084Z digest=sha256:891b674d0b640a1424b4ccb05a01f1cc74c36b9dad76983ab50f440d452e9ac6

Observation 979bedca-9afd-4849-97dd-138b9909ed2f · outbound

This paper cites P‐44: A Smart Eye Tracking System Based on Linear Array Sensors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process P‐44: A Smart Eye Tracking System Based on Linear Array Sensors

Reference 12

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.458604Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.767474Z digest=sha256:3c60f8a4ba56f94f9cb0d5898e46d472bc7b4abd676750b55d207c388406f9c1

Observation b8fea0a2-a4ff-4218-9226-77b6089dbe48 · outbound

This paper cites 3.8× 3.8 mm 2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 3.8× 3.8 mm 2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

Reference 13

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.278508Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.834327Z digest=sha256:639961c30581ce2c3847c261d0304cd8bbe03e949365df0d5525af227352c81d

Observation 9ee9358a-ac5c-44cd-8c23-389ccb3e6fc7 · outbound

This paper cites International Journal of Imaging Systems and Technology, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process International Journal of Imaging Systems and Technology, 2024

Reference 14

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:12.122640Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.940168Z digest=sha256:e5a5dc8a3e87dd9cb26128b9a2d5c43cf7d8a32f188e38ab75a73a96b37abdd7

Observation 949815c5-1f5b-44a8-b025-df450ee893a1 · outbound

This paper cites IEEE Sensors Journal, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process IEEE Sensors Journal, 2024

Reference 15

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.890340Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.040327Z digest=sha256:31d74f9e29d8b3a956021c204be72b096b4d010240f705981d806b7a49419fae

Observation d0757027-b9e7-48a9-8bc8-6a3cb7a91202 · outbound

This paper cites Microsystems & Nanoengineering, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Microsystems & Nanoengineering, 2024

Reference 16

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.702195Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.131265Z digest=sha256:41ac9c03c9cc49d3c7a8ccd6460aebe60ec9eeb4529dfefc2794f481c6e11632

Observation a5f44c17-4e31-4275-a475-3906a586a44b · outbound

This paper cites International Journal of Optomechatronics, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process International Journal of Optomechatronics, 2024

Reference 17

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.582804Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.192067Z digest=sha256:bff89528cc85bbb9bd9c6c0fda16f1ed658ab0dc9d0e7d73b982f907e814a8f4

Observation be84d95b-be18-4c52-b310-40017d09094c · outbound

This paper cites Kasturi, and V.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Kasturi, and V

Reference 18

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.426459Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.256782Z digest=sha256:c46902397fb398f97e4f5c16a43143245387b9b37a492aef401bfdff3742cd6f

Observation 73aa80e1-515a-4f1e-ad8e-bbfb023101ed · outbound

This paper cites Yamaguchi, and T.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Yamaguchi, and T

Reference 19

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.332167Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.305539Z digest=sha256:a8747d3e0014188eb4b2329d72dd95a34e3f4eb83ab703c2ef4401a519bd53f8

Observation 5694e3d6-12f4-4cf1-85c0-afe37b637972 · outbound

This paper cites Laser beam scanning based AR-display applying resonant 2D MEMS mirrors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Laser beam scanning based AR-display applying resonant 2D MEMS mirrors

Reference 20

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:11.213237Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.433360Z digest=sha256:ea69093f5032a51927f56eeb15e1c858cb34036f1b7b904c3c960475b8a9dfdf

Observation fd19aa5e-3f45-4249-b611-cfc4f24ee8e8 · outbound

This paper cites Procedia Engineering, 2010.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Procedia Engineering, 2010

Reference 21

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.986542Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.519609Z digest=sha256:9fe9884d1a81eea0383be6cfc83519e832f9874128832f87f92d78f99e59cefb

Observation c75aee8c-5aaf-4cec-b52c-e5b04b6c6847 · outbound

This paper cites Baran, and H.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Baran, and H

Reference 22

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.739570Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.597796Z digest=sha256:7105f9c7d575c34f586c1699d7741d46bf6601050f463d2831d2e3821a738954

Observation f6824983-f9d8-4e20-a555-c0f362b01195 · outbound

This paper cites Pribošek, and M.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Pribošek, and M

Reference 23

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.463325Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.699828Z digest=sha256:fabf54493358487ace01247ad8a2618acc75520edec1dd6fd6b4918aa361dfe0

Observation 69706046-301c-4abb-9502-937eec91fe8c · outbound

This paper cites Journal of Micromechanics and Microengineering, 2020.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2020

Reference 24

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:10.020292Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.791805Z digest=sha256:8c2f9f61232a555db96258144a5e5bee36ea977c6ee2dc97730aa1866d96bc81

Observation 040a064e-83c9-4891-ad2e-e3cf78e1a0e3 · outbound

This paper cites Modeling electrostatic MEMS actuator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Modeling electrostatic MEMS actuator

Reference 25

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.774593Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:01.901796Z digest=sha256:5dfb29b5ceb4a0ee95eb157e6395e0c1600921220f3a61186b990e53335eacb3

Observation 2eb6ef6a-48a5-4d17-901f-e61ff1412421 · outbound

This paper cites Optics and Lasers in Engineering, 2013.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics and Lasers in Engineering, 2013

Reference 26

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.426537Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.018689Z digest=sha256:ac81117977ec3034940000b0b188dc5215361d47236e376d89c2d519161928f7

Observation ebfa03b9-7178-480e-b306-0ff237ba406b · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 27

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:09.225925Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.096556Z digest=sha256:e2a37b411130ae379c2158bccb3c8e798f1a0d0aa8bfd68a9fcf85abe41411d7

Observation 668d71ca-9375-49eb-ae6e-06e5376a18ca · outbound

This paper cites Journal of Micromechanics and Microengineering, 2018.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2018

Reference 28

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:09.146147Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.212937Z digest=sha256:306a06b2b0baf01889f10b027f508da6341eab34431d19e4cb7c371f042cf514

Observation ac4f0c3a-d43b-4f42-b182-3cfc27859b07 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 29

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:09.028156Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.314550Z digest=sha256:c984746e9f7e8bf50b5a68330fbb0b0c70d26d2a606f1ca373f373ccfaf4a309

Observation 3df55bb2-a21e-4082-aa15-e195dbb13f2b · outbound

This paper cites and S.-S.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process and S.-S

Reference 30

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.884109Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.400692Z digest=sha256:16a2e682bedc15567f0fce542836998e1857511c216591671e3271535dfb8e4d

Observation 3d721e9d-3552-4f14-bb69-31ac275cf1ed · outbound

This paper cites Mirzajani, and M.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Mirzajani, and M

Reference 31

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.570909Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.614149Z digest=sha256:bdfceae3cfdbcd93a546b686290e3724222453d819108a9fbf84fb2ac34c22f9

Observation 00898e78-a48f-46f7-ade8-55e8dceba063 · outbound

This paper cites An acoustic piezoelectric ring-shape Lamb wave MEMS resonator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process An acoustic piezoelectric ring-shape Lamb wave MEMS resonator

Reference 32

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.463341Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.687595Z digest=sha256:0e466243f09703c15197e0f38e7cba3e2a8a64da8262a8572bd24f28fe621624

Observation 5fc54886-1b64-4823-9a82-e1f13470f5dc · outbound

This paper cites Sensors and Actuators A: Physical, 2025.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Sensors and Actuators A: Physical, 2025

Reference 33

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.286771Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.774086Z digest=sha256:19dc452b258aba54e45035c023bd495a0a2a5455f0972d5fb6279f1f464ccbe8

Observation 12956815-5bd5-4792-9988-4b0a2119bfaa · outbound

This paper cites Lu, and K.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Lu, and K

Reference 34

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:08.116100Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.856269Z digest=sha256:98264ed0b16a605293a516cdb62d0457ebdb9317a5a9feb9274ff3d07bd3049e

Observation 12851d61-e5d9-4960-b9cb-421860a14f4f · outbound

This paper cites Wang, and P.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Wang, and P

Reference 35

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.928163Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.922986Z digest=sha256:b795de3f1009c16c228dcd0cf37bda4bd521299f3be75257e6ea65bc9ad3e582

Observation 3d67d6b3-791c-4bc5-9637-45288bc9b6fc · outbound

This paper cites 2D micro scanner actuated by sol-gel derived double layered PZT.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 2D micro scanner actuated by sol-gel derived double layered PZT

Reference 36

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.812428Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.022821Z digest=sha256:f4f8b89f6c59e371e7b5214d93be6d86c182d2423c0ce1e48cdc404f76279229

Observation 4cd75d19-96a4-4f88-bdb5-7a45b8f795fa · outbound

This paper cites Integrated Ferroelectrics, 2006.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Integrated Ferroelectrics, 2006

Reference 37

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.656473Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.102189Z digest=sha256:a9bd34ad1077d1ef6183cbcc5ee4c70a18e58ba12074172f9ed28442ed1775ea

Observation ac5c119b-4cb3-4b2b-877e-326b8ebfcb4a · outbound

This paper cites Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Reference 38

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.463727Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.212194Z digest=sha256:386f5d56517ab28f75e04170bbed5b4428f2f63b7e63d4c10a6458b8d85e6c58

Observation c36c4709-bab9-4189-9511-3b79d0074a67 · outbound

This paper cites A two-axis piezoelectric tilting micromirror with a newly developed PZT- meandering actuator.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process A two-axis piezoelectric tilting micromirror with a newly developed PZT- meandering actuator

Reference 39

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.300742Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.327743Z digest=sha256:3f477e0a8df9e9b06914a05133aa8f14df7a46d3aa2d956b4b1ef61135c6e4cd

Observation 015c4766-a7f1-4040-9103-9fc66563306c · outbound

This paper cites A combination of fast resonant mode and slow static deflection of SOI- PZT actuators for MEMS image projection display.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process A combination of fast resonant mode and slow static deflection of SOI- PZT actuators for MEMS image projection display

Reference 40

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.145721Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.438497Z digest=sha256:09fb359f2dce79cd1f8c017154653184a6aeb4f03683bfa8176f966bc3eaf544

Observation 11273c27-af6c-4f83-ad67-2a2a7f0f9453 · outbound

This paper cites Journal of microelectromechanical systems, 2012.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of microelectromechanical systems, 2012

Reference 41

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:07.016285Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.542317Z digest=sha256:03c2189fb551f0df90773917ef16070568f47c1bbaa3435029b1b7771cdb8621

Observation 09425845-d76b-4458-81ac-3dc328fe2adb · outbound

This paper cites Resonant PZT MEMS scanners with integrated angle sensors.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Resonant PZT MEMS scanners with integrated angle sensors

Reference 42

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.872547Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.656391Z digest=sha256:33acef63f31b16675f547a22fc9517ea0c90d3a68d4be2f24cdcd6ccbb5ae691

Observation 657caf07-f9ad-4dde-9c94-3152792ffa08 · outbound

This paper cites Journal of Materials Research, 2011.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Materials Research, 2011

Reference 43

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.694255Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.771711Z digest=sha256:861223938d7e809017689389965373c98d2c1858fde62628635221362000e257

Observation 1e092b34-bcff-47b1-b39a-471e11711540 · outbound

This paper cites Analysis of the nonlinear response of piezo-micromirrors with the harmonic balance method.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Analysis of the nonlinear response of piezo-micromirrors with the harmonic balance method

Reference 44

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.528529Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.884663Z digest=sha256:d9bd59713e4ca78a7e67cfbe407a93152ae93685d0b19c9c490b8d40a0724217

Observation fa91ba75-a6b6-4a9a-b6cc-da6f121dea1e · outbound

This paper cites Optics Express, 2023.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Optics Express, 2023

Reference 45

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.361052Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:03.947761Z digest=sha256:d5909afa4c8c86e0bf65a81e5d1c25164e8ce13c607d5b6b4d2c87ef25bffa10

Observation 4e530c07-12ab-4ac9-81d3-29a626f1b525 · outbound

This paper cites Journal of Micromechanics and Microengineering, 2024.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Journal of Micromechanics and Microengineering, 2024

Reference 46

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:06.170579Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.068585Z digest=sha256:d47773760440828e017aeab1405cf35940e919d108e582527b17813f0f1e300a

Observation 46bda414-3c0b-4119-a42b-1cd0f9e367fc · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 47

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.994865Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.175549Z digest=sha256:9050f61a46b8a7c42daea56c501936576f0517297a9739ed24864bb485a98594

Observation 485ed5d4-a509-4c2b-a294-f8cd3d5e5115 · outbound

This paper cites Resonant body transistors in standard CMOS technology.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Resonant body transistors in standard CMOS technology

Reference 48

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:05.822377Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.274613Z digest=sha256:7ae71bbc9e154ba0fbf787e0fd0e69c31ecbe21db9cb9f2bc86f446fc073270e

Observation 5168daa4-d8d8-4be7-bc23-05158e1436dd · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 49

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.602131Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.384919Z digest=sha256:7aec03617a795caa2bc2b7a67411b53224702244eaadba0e0aac4721a6ad2691

Observation 6608f30a-1be8-4730-b8f4-078e95950278 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 50

Resolution
unresolved
raw_fallback, observed 2026-08-07T12:22:05.317356Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.484654Z digest=sha256:c79ef3b87180312998483c9d4014247666519bb39c6a746a01e53daa439b0afc

Observation 03651cdc-1eb7-49e6-bbb2-8860ef598e45 · outbound

This paper cites Applied Spectroscopy Reviews, 2025.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Applied Spectroscopy Reviews, 2025

Reference 51

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:05.108827Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.568918Z digest=sha256:89c5aaad1b4f056df13a83375c04ce5ce97ab1fceb9e998b6fd2b97367fddb1d

Observation a327d22c-fdfa-49df-a5be-db97eab76fca · outbound

This paper cites Wagner, and P.A.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Wagner, and P.A

Reference 52

Resolution
verified fuzzy
raw_fallback, observed 2026-08-07T12:22:04.927594Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:04.684467Z digest=sha256:18ed61c37ddcdd17565958c234c213dd56c6c3c1644985732f6d02d9d33275a6

Observation e0202334-8852-48d7-bd10-e9b7f1531f8b · outbound

This paper cites 12589-12605.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process 12589-12605

Reference 2020

Resolution
parse uncertain
raw_fallback, observed 2026-08-07T12:22:08.695560Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:02.504187Z digest=sha256:dde4d729b40c5664398a6156b7f2c1f2570c223e2a9de8669a1cae915f8d980e

Observation 6365ef98-3c05-4249-9049-74ff386b4f24 · outbound

This paper cites an unresolved cited work.

2D PZT MEMS Resonant Scanner Using a Three-Mask Process Unresolved cited work

Reference 2024

Resolution
parse uncertain
raw_fallback, observed 2026-08-07T12:22:12.796043Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-10T06:31:04.303077+00:00.

source=pdf_text observed=2026-08-07T12:22:00.537822Z digest=sha256:fda6e5ca54455626e0a579ff00ee696cee656a11547899ce8ccc928580b4f277

Pith citing papers

No inbound Pith citation observations are available.