Integrity report for Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

A machine-verified record of the checks Pith has run against this paper: detector runs, findings, signed bundle events, and canonical identifiers.

arXiv:physics/0103055 · pith:2001:CVNNJCCPPYR2D3AOMNPVYQDX3Y

0Critical

0Advisory

0Detectors run

—Last checked

Paper page arXiv integrity.json bundle.json

Detector runs

Findings

No public integrity findings for this paper.

Signed record

The machine-readable record for this paper lives at /pith/CVNNJCCPPYR2D3AOMNPVYQDX3Y/integrity.json. Pith Number bundles also include signed pith.integrity.v1 events where a Pith Number exists.