Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings
classification
⚛️ physics.optics
keywords
braggeffectserrorsgratingsintroducedperformancestitchingwaveguide
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We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details.
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