Typed states for the displayed outbound observations.
Source: paper_references, paper_reference_links, observed 2026-08-15T16:17:05.596052Z
Paper Citation Record · LEDGER
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry
As of 16 August 2026, this Paper Citation Record lists 6 of 6 outbound references and 0 inbound Pith citation observations for arXiv:2509.07554.
A citation records a reference. It does not transfer a finding from one paper to another.
Coverage vector
One-hop event checks from named stored sources.
Source: scholarly_work_events, retraction_status_cache, observed 2026-08-16T06:30:59.297886+00:00
Pith citing papers itemized under the disclosed page cap.
Source: paper_references, paper_reference_links
A source-named dated measurement, never combined with another source.
Source: cited_works
Reference resolution
6 of 6 outbound references displayed
- verified exact0
- verified fuzzy3
- unresolved3
- parse uncertain0
- malformed identifier0
- metadata mismatch0
External citation measurements
No source-named external measurement is stored.
Outbound references
Observation 8b81a628-d7bd-4d32-ad6a-e3f1d19c7760 · outbound
This paper cites Once the gas is adsorbed on the surface it chemically modifies the top atomic layer s.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Once the gas is adsorbed on the surface it chemically modifies the top atomic layer s
Reference 1
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-15T16:17:05.723554Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Observation 41d3d264-da48-4546-9dc9-fe9fe98b0562 · outbound
This paper cites Ar, to remove the unreacted reaction byproducts from the surface.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Ar, to remove the unreacted reaction byproducts from the surface
Reference 2
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-15T16:17:05.705733Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Observation bfbee63b-8970-4c8c-98b2-efc937f2ff50 · outbound
This paper cites an unresolved cited work.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Unresolved cited work
Reference 3
- Resolution
- unresolved
- raw_fallback, observed 2026-08-15T16:17:05.687398Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Observation ce17a294-6543-469b-aea4-4fc58ad03fa6 · outbound
This paper cites an unresolved cited work.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Unresolved cited work
Reference 4
- Resolution
- unresolved
- raw_fallback, observed 2026-08-15T16:17:05.670351Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Observation 93dba767-901c-42fb-a0c5-eb1ff062dfea · outbound
This paper cites an unresolved cited work.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Unresolved cited work
Reference 5
- Resolution
- unresolved
- raw_fallback, observed 2026-08-15T16:17:05.653019Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Observation 7e343cd2-cf02-4e9b-87c1-7a5972a06976 · outbound
This paper cites Fundamentals of atomic and close-to-atomic scale manufacturing: a review,.
Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry Fundamentals of atomic and close-to-atomic scale manufacturing: a review,
Reference 6
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-15T16:17:05.636128Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.
Pith citing papers
No inbound Pith citation observations are available.