Typed states for the displayed outbound observations.
Source: paper_references, paper_reference_links, observed 2026-08-16T12:41:15.228685Z
Paper Citation Record · LEDGER
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
As of 24 August 2026, this Paper Citation Record lists 56 of 56 outbound references and 0 inbound Pith citation observations for arXiv:2504.12133.
A citation records a reference. It does not transfer a finding from one paper to another.
Coverage vector
One-hop event checks from named stored sources.
Source: scholarly_work_events, retraction_status_cache, observed 2026-08-23T06:30:58.430688+00:00
Pith citing papers itemized under the disclosed page cap.
Source: paper_references, paper_reference_links
A source-named dated measurement, never combined with another source.
Source: cited_works
Reference resolution
56 of 56 outbound references displayed
- verified exact1
- verified fuzzy30
- unresolved25
- parse uncertain0
- malformed identifier0
- metadata mismatch0
External citation measurements
No source-named external measurement is stored.
Outbound references
Observation e9fd9591-8ec0-4ac9-9abf-5437a2da2ef2 · outbound
This paper cites Esashi, N.
Reference 1
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.222806Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 57a21e85-5e9d-47eb-9bcd-29e731f7c029 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 2
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:16.203387Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation d18c1092-5a43-4342-b1cb-b78ca5dcefd9 · outbound
This paper cites Klein, N.
Reference 3
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.185578Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation c224f65b-ff1f-480c-adcb-5cf6301b6c16 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 4
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:16.160989Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 5953d127-bb27-4327-870d-15d7fe4e5d3d · outbound
This paper cites Soltwisch, A.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Soltwisch, A
Reference 5
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.140293Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation f230e16d-10ef-4dd5-847f-a973ca8131f2 · outbound
This paper cites Porter, T.
Reference 6
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.119746Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation dc7aee90-6fcb-444f-bec0-6d12cf95e580 · outbound
This paper cites Raymond, Overview of scatterometry applications in high volume silicon manufacturing, AIP Conference Proceedings 788, 394--402 (2005).
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Raymond, Overview of scatterometry applications in high volume silicon manufacturing, AIP Conference Proceedings 788, 394--402 (2005)
Reference 7
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.100602Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation f3507213-b17a-48e3-a7c4-5fc89b5ea1b3 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 8
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:16.081528Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation a0400362-c181-4e03-b439-0912a94b615d · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 9
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:16.063553Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 4362e68f-b2dc-488d-88bb-b8744ca0c73f · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 10
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:16.045119Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation cf651f09-9e94-4f59-b644-48fc9501f7d4 · outbound
This paper cites Nakasuji, A.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Nakasuji, A
Reference 11
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.027878Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 8e490e81-dd48-4f46-888e-dd308e98a21e · outbound
This paper cites Sabbagh, A.
Reference 12
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:16.010913Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 9f53f1df-6eca-41b0-8025-79796fd6257b · outbound
This paper cites Sherwin, M.
Reference 13
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.994263Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 5c205d8f-8f85-4fc4-bbde-3e89a3e76078 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 14
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.977501Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 7ba96dbc-9cc8-4e57-83e8-1b94336f2666 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 15
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.961333Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation ace2c1f7-b71f-49b8-8fb7-4fffcd34edf2 · outbound
This paper cites Ku, C.-L.
Reference 16
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.944481Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation a596d7f7-ede2-45c4-8f40-8d9826a77061 · outbound
This paper cites Rundquist, C.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Rundquist, C
Reference 17
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.927202Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation b097a9c2-ad64-46e0-8d0b-116b733632f8 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 18
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.904657Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 4fcd9f8f-9707-4fdd-9874-e3b683d87ee6 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 19
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.888295Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 689b6575-f046-4e35-a127-d46a67878c21 · outbound
This paper cites Jansen, X.
Reference 20
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.870894Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation db3773c8-522b-4b77-ad46-7f5364b19ed0 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 21
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.853181Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 58b470a6-33e6-4f1d-a5b8-738b5f3483be · outbound
This paper cites Loetgering, S.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Loetgering, S
Reference 22
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.837550Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation d1a681d2-526a-43f4-aee3-653090993c05 · outbound
This paper cites Tanksalvala, C.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Tanksalvala, C
Reference 23
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.821232Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 6c7acce4-4b67-4670-9e3f-d39d0fb59dad · outbound
This paper cites Doering, F.
Reference 24
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.804994Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation f776b3f2-14b9-4896-a2df-b56bdf483928 · outbound
This paper cites Eschen, C.
Reference 25
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.788956Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 92dafaf2-195b-4416-a50c-9ed55a5efa94 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 26
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.772387Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 438f0778-285e-4876-9c16-696b7461e907 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 27
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.756456Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 571974a0-522d-4900-a851-cf69b5feddd5 · outbound
This paper cites Kapteyn, M.
Reference 28
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.739888Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 907711ac-0820-4713-9525-fba5c2aba272 · outbound
This paper cites Bartels, S.
Reference 29
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.724303Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 84a47822-5ea3-4bd8-a89c-ca5c50cc2989 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 30
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.707943Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation f70ff640-2dd7-4bf9-925c-83cc610bd423 · outbound
This paper cites Klein, N.
Reference 31
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.692237Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation acdd5504-3629-48a0-8688-953f096338f3 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 32
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.676815Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 1909bba2-a89d-47b7-820b-47d9ccab43db · outbound
This paper cites Mikhalychev, K.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Mikhalychev, K
Reference 33
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.661582Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 3d5787be-2aa1-440d-909e-f3cc06384ca7 · outbound
This paper cites Yang, Decision-oriented two-parameter F isher information sensitivity using symplectic decomposition, Technometrics 66, 28--39 (2024).
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Yang, Decision-oriented two-parameter F isher information sensitivity using symplectic decomposition, Technometrics 66, 28--39 (2024)
Reference 34
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.646695Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 832e6089-6e16-46dc-bb79-6a61bc5790ab · outbound
This paper cites Weedon, S.
Reference 35
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.630746Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 4b85ec93-b4d5-4d4a-a9a4-1d1bc799199d · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 36
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.615691Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 01e4815d-035d-4d5e-8bb1-2f746959a4a7 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 37
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.600047Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation b4fd492e-54f7-46e0-9efa-bd7b47ebcccf · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 38
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.583778Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 9a2531fd-8c77-4507-bef3-97b7dbafdd76 · outbound
This paper cites Ansuinelli, W.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Ansuinelli, W
Reference 39
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.568078Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation a20f7dea-067b-4bd6-9eec-accc8b2e7182 · outbound
This paper cites RETICOLO software for grating analysis.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design RETICOLO software for grating analysis
Reference 40
- Resolution
- unresolved
- no resolver link, observed 2026-08-16T12:41:15.133171Z
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 5e9d5858-748e-49f7-bc3c-4e6da9cec1a2 · outbound
This paper cites Ulyanenkov, K.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Ulyanenkov, K
Reference 41
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.552217Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation ff31a191-9521-46bd-9bab-185c3d105dc5 · outbound
This paper cites Gross, A.
Reference 42
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.536365Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 30a7571d-9c92-408a-aa43-f151b26a509b · outbound
This paper cites Heidenreich, M.-A.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Heidenreich, M.-A
Reference 43
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.519713Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation a7bad895-7779-4249-9475-59fa9f90cd83 · outbound
This paper cites Efficient optimization of plasma surface high harmonic generation by an improved Bayesian strategy.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Efficient optimization of plasma surface high harmonic generation by an improved Bayesian strategy
Reference 44
- Resolution
- verified exact
- local_arxiv, observed 2026-08-16T12:41:15.282165Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation ba4b7112-40f6-4e55-919a-33b634c211af · outbound
This paper cites Klein and C.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Klein and C
Reference 45
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.502637Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation db609bea-9b85-436f-b544-950a8f401e08 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 46
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.485576Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 7940095f-c2f2-4a01-9c94-b48e9f1aeba1 · outbound
This paper cites Morrill, W.
Reference 47
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.466697Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 124e5d3b-00ca-49ab-b4f2-d43fb0953958 · outbound
This paper cites Jacobsen, X-Ray Microscopy (Cambridge University Press, 2019), chap.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Jacobsen, X-Ray Microscopy (Cambridge University Press, 2019), chap
Reference 48
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.449449Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 4a39f59d-0b23-4eb2-a77e-ff70d52d3bf4 · outbound
This paper cites Du and C.
Reference 49
- Resolution
- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.431990Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation cd16fb55-5eeb-4d8d-8fe2-842b12bc2a81 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 50
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.413804Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 6942fb76-19de-41af-929c-7eaaa5363643 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 51
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.396960Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation aaddf287-673f-456b-9693-e808a76627d6 · outbound
This paper cites , " * write output.state after.block = add.period write newline.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design , " * write output.state after.block = add.period write newline
Reference 52
- Resolution
- unresolved
- no resolver link, observed 2026-08-16T12:41:15.203800Z
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 9064481c-88cf-4d66-8f33-cea9cc78b756 · outbound
This paper cites write newline.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design write newline
Reference 53
- Resolution
- unresolved
- no resolver link, observed 2026-08-16T12:41:15.209000Z
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 4b1003c5-7c58-452e-8dd6-cf6f3738967d · outbound
This paper cites write newline.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design write newline
Reference 54
- Resolution
- unresolved
- no resolver link, observed 2026-08-16T12:41:15.216452Z
Source-reported events for the cited work
Unavailable: canonical work link unavailable.
Observation 859ff9ea-8837-47dd-b6c4-813cb4bd6573 · outbound
This paper cites an unresolved cited work.
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Unresolved cited work
Reference 55
- Resolution
- unresolved
- raw_fallback, observed 2026-08-16T12:41:15.341095Z
Source-reported events for the cited work
No event found in the named queried sources as of 2026-08-23T06:30:58.430688+00:00.
Observation 8bed7794-433b-4e82-977a-ca9f1d07655e · outbound
This paper cites Yang, Decision-oriented two-parameter fisher information sensitivity using symplectic decomposition, Technometrics 66, 28--39 (2024).
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design Yang, Decision-oriented two-parameter fisher information sensitivity using symplectic decomposition, Technometrics 66, 28--39 (2024)
Reference 56
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- verified fuzzy
- raw_fallback, observed 2026-08-16T12:41:15.322852Z
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