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Advanced Techniques in Automated High Resolution Scanning Transmission Electron Microscopy

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arxiv 2303.05543 v2 pith:NEF2Y673 submitted 2023-03-09 physics.ins-det

classification physics.ins-det
keywords acquisitiondataelectronhumanmicroscopyprogramsamplescanning
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Scanning transmission electron microscopy is a common tool used to study the atomic structure of materials. It is an inherently multimodal tool allowing for the simultaneous acquisition of multiple information channels. Despite its versatility, however, experimental workflows currently rely heavily on experienced human operators and can only acquire data from small regions of a sample at a time. Here, we demonstrate a flexible pipeline-based system for high-throughput acquisition of atomic-resolution structural data using a custom built sample stage and automation program. The program is capable of operating over many hours without human intervention improving the statistics of high-resolution experiments.

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