Focusing Optical Phased Array for Optically Enabled Probing of the Retina with Subcellular Resolution

We present a silicon-nitride-based optical phased array with built-in focusing and steering capability, that operates at 522 nm and is aimed at complementing a micro-electrode array for joint electrical and optical probing of retinal tissue. It achieves subcellular resolution with a beam diameter of 1.4 um at a focal point located above the chip. Targeted cellular excitation can be achieved by steering the beam through a combination of wavelength tuning and simplified thermo-optical phase shifters with a single electrical input for each of transverse beam steering and selection of the focal plane.