Hybrid light-emitting polymer/SiNx platform for photonic integration

Organic semiconductors have potentials for a broad range of applications; however, it is difficult to be integrated with traditional inorganic material to meet the need of further application. Based on low-temperature silicon nitride (SiNx) deposition technique, here we demonstrate a hybrid structure fabricated by directly depositing high-quality SiNx on organic polymer film Poly[2-(2',5'-bis(2"-ethylhexyloxy)- phenyl) -1,4-phenylene vinylene] (BEHP-PPV). Stacked BEHP-PPV/SiNx hybrid structures with different periods are obtained and their optical properties are systematically characterized. Moreover, a group of BEHP/PPV embedded SiNx micro-disk is fabricated and amplification of spontaneous emission (ASE) is observed under optical pumping, further confirming that the gain properties of BEHP/PPV are well preserved. Our technique offers a platform to fabricate organic/inorganic hybrid optical devices compatible with integrated components.