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Integrity report for Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

A machine-verified record of the checks Pith has run against this paper: detector runs, findings, signed bundle events, and canonical identifiers.

arXiv:1602.02624 · pith:2016:OA6UOURW5B45R2VVNTP7DHJ4FJ

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Paper page arXiv integrity.json bundle.json

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Signed record

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