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Integrity report for Holographic EUV Lithography at 40 nm Resolution

A machine-verified record of the checks Pith has run against this paper: detector runs, findings, signed bundle events, and canonical identifiers.

arXiv:2605.21430 · pith:2026:PSUBH5BLBHCJLGGKUEPYDRLHYE

0Critical
0Advisory
8Detectors run
2026-06-03Last checked

Paper page arXiv integrity.json bundle.json

Detector runs

doi_title_agreement completed v1.0.0 · findings 0 · 2026-06-03 11:05:41.579663+00:00
doi_compliance completed v1.0.0 · findings 0 · 2026-05-31 12:20:04.219865+00:00
ai_meta_artifact completed v1.0.0 · findings 0 · 2026-05-28 03:35:34.412962+00:00
claim_evidence completed v1.0.0 · findings 0 · 2026-05-26 09:24:06.124923+00:00
external_links completed v1.0.0 · findings 0 · 2026-05-21 17:34:04.553159+00:00
shingle_duplication completed v0.1.0 · findings 0 · 2026-05-21 09:50:05.482341+00:00
citation_quote_validity completed v0.1.0 · findings 0 · 2026-05-21 03:50:31.779257+00:00
cited_work_retraction completed v1.0.0 · findings 0 · 2026-05-21 02:52:26.564206+00:00

Findings

No public integrity findings for this paper.

Signed record

The machine-readable record for this paper lives at /pith/PSUBH5BL/integrity.json. Pith Number bundles also include signed pith.integrity.v1 events where a Pith Number exists.