Programmable vs. Static Beam Shaping in Ultrafast Laser Micromachining: A Critical Review

Krystof Kobliha; Peter Hauschwitz

REVIEW 3 major objections 5 minor 247 references

Programmable vs. Static Beam Shaping in Ultrafast Laser Micromachining: A Critical Review

T0 review · 3 major / 5 minor · reviewed 2026-08-16 · deepseek-v4-flash

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Pith's one-line read This review argues that ultrafast-laser beam shaping now behaves as a hardware–algorithm co-design problem, and that the old throughput-versus-flexibility trade-off has collapsed on the average-power axis in parallel ablation and…

desk verdict Useful, honest review that deserves peer review, but the 'collapse' verdict overclaims because the comparison never includes a static multi-spot DOE baseline. read the letter →

arxiv 2608.11861 v1 pith:QEVED5SX submitted 2026-08-12 physics.optics

Krystof Kobliha , Peter Hauschwitz This is my paper · ORCID

classification physics.optics

keywords beamshapingspatiallightmodulatorultrafastlasermicromachiningtwo-photonpolymerisationcomputer-generatedholographymachinelearninghybridopticsthroughput-flexibilitytrade-off

verification ladder T0 review T1 audit T2 compute T3 formal

The pith

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

The reading

This review re-examines the standard distinction between programmable and static beam-shaping optics in ultrafast laser micromachining. It argues that the field should be read as a hardware–algorithm co-design problem, and that the long-standing trade-off between throughput and flexibility has genuinely collapsed on the average-power axis in two regimes: industrial parallel ablation and high-throughput two-photon polymerisation. Programmable spatial light modulators now sustain average powers and write rates once reserved for static diffractive or freeform optics, provided the modulator and its hologram-generation algorithm are designed together. The collapse is bounded: it does not extend to femtosecond-burst peak-fluence tolerance, which remains uncharacterised for every programmable class, nor to high-volume fixed-geometry production, where static optics still win on amortised cost. The paper contributes a seven-axis benchmark, a break-even cost rule, and a reporting standard.

What carries the argument

The carrying object is the co-designed hardware–algorithm pair: a spatial light modulator, deformable mirror, or other shaper together with the hologram-generation algorithm that programs it, treated as a single design space rather than as competing components. The review evaluates every pair on seven axes—reconfigurability, average-power and peak-fluence handling, optical efficiency, beam-quality fidelity, three-dimensional programmability, capital cost, and per-pattern computational cost—and uses the break-even count $n^*$ from the inequality $C_s + n r < C_p$ to decide when a programmable shaper becomes the rational industrial choice. Hybrid stacks, such as SLM+DOE cascades and metasurface+SLM arrays, are the mechanisms by which later optical layers relax the constraints of earlier ones.

What would settle it

Run the 210 W pulsed cooled-SLM geometry under a sustained industrial duty cycle at 2 MHz and monitor full 2π phase range and liquid-crystal integrity over repeated shifts: irreversible degradation within one shift would falsify the average-power collapse. A complementary check is to measure total energy per generated hologram for a learned pipeline against the iterative Gerchberg-Saxton baseline; if learned inference consumes more energy per pattern, the co-design cost advantage is falsified.

Watch

Extended reading notes

Core claim

Performance in beam shaping is governed by the co-design of the modulator, its driving algorithm, and the process physics, not by the raw specification of any single optical component. On the average-power axis, programmable devices have now matched throughput once reserved for static optics in two regimes: industrial parallel ablation, where a 20-spot, 100 W SLM system removed material at 6 mm3 min−1 while the modulator hardware was separately demonstrated to 210 W under pulsed loading, and high-throughput two-photon polymerisation, where holographic multi-foci and DOE-array routes each reached of order $10^{8}$ voxels s−1 and a metalens-array platform added a further order of magnitude. The paper reads these as evidence that the historical frontier between throughput and flexibility is breaking down, while insisting that the collapse is partial: it applies to average power, not to the femtosecond-burst peak-fluence tolerance that governs micromachining, and it does not make programmable optics cheaper than static optics for fixed-geometry, high-volume production.

Load-bearing premise

The verdict that the throughput-flexibility trade-off has collapsed on the average-power axis rests on the sustained replicability of a few single-group high-power demonstrations, above all the 210 W pulsed cooled-SLM result; if that device degrades irreversibly under an industrial duty cycle, or if the literature's silence on femtosecond-burst peak-fluence limits is merely a search gap, the collapse loses its evidence base.

Editorial extensions

If this is right

If the collapse is real, programmable beam shaping becomes the cost-effective choice for high-mix, low-volume work where geometry changes exceed the break-even count $n^*$, but static optics remain rational for fixed-geometry, high-volume production.
The binding constraints on throughput shift from the beam shaper itself to the process it drives: resist photochemistry, substrate thermomechanics, and the energy cost of computing each pattern.
Comparisons that pit modulator against modulator without reporting the driving algorithm and the sustained operating condition will miss the decisive variable, so the seven-axis frame and its reporting standard become necessary for future demonstrations.
Hybrid architectures, in which a static element supplies high-power bandwidth and a programmable element supplies per-pattern selection, are the route to operating points neither layer reaches alone.
The peak-fluence axis remains open: no programmable class has a characterised femtosecond-burst damage threshold at MHz repetition rates, so the practical scope of the collapse will be settled by future burst-LIDT measurements.

Reading between the lines

Editorial extensions of the paper, not claims the author makes directly.

Editorial inference: if the average-power collapse survives independent replication, the historical programmable-versus-static framing should be retired for process-selection decisions and replaced by break-even analysis on pattern-change count and per-pattern compute cost.
Editorial inference: the literature's silence on femtosecond-burst peak-fluence limits may reflect a measurement gap rather than a true physical limit, so a standardised burst-duty-cycle LIDT protocol could resolve the open axis faster than any further average-power record.
Editorial inference: a testable extension of the co-design thesis is to apply the same seven-axis frame to adjacent thermal processes such as welding and powder-bed fusion; if the collapse appears there first, it would confirm that the bottleneck is process physics, not optics.
Editorial inference: the per-pattern computational-cost axis, which the paper identifies as the one axis where static optics are strictly superior, suggests an explicit engineering target: reducing learned-hologram energy per pattern enough to drive $n^*$ toward one, which would make programmable optics the default rather than the exception.

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Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, and a circularity audit.

Desk Editor's Note

read the letter

Dear colleague,

Read this one. It is a serious review and deserves referee time, but the headline claim is broader than the evidence. The genuinely new pieces are the seven-axis frame applied across seven hardware classes and five algorithm families, the cost break-even inequality (Eq. 1), the operational definition of "collapse" (sustained, not one-shot), six falsifiable milestones, and a reporting standard. The paper is disciplined where reviews often are not: single-group champions are disclosed and explicitly set aside where possible, the peak-fluence axis is scored open rather than hand-waved, and the two self-citations are narrow and declared. The citation pattern looks honest; the 249 sources include deliberate industrial counter-perspectives.

The soft spot is also the load-bearing one. Section 8 and Table 4 say that in industrial parallel ablation and high-throughput TPP, a programmable device now reaches a throughput "once reserved for static optics." But the status-quo-ante comparator in Table 4 for parallel ablation is single-spot serial ablation, not a static multi-spot DOE. Table 2 has no static-optics row for parallel ablation at all. For TPP, the only fixed multi-spot route discussed, Kiefer's DOE-plus-microlens array at roughly 10^8 voxels/s, is a 2024 static result that Zhang's SLM route matches. That supports "programmable now matches the current best static multi-spot throughput," not "programmable has entered a regime only static optics could occupy." Fixed DOEs at the 100 W class have done multi-spot ablation for years; the paper never puts a number on them. The average-power collapse may be true, but this manuscript does not demonstrate it in the form stated. This is independent of Tang et al. replication; even a fully verified 210 W SLM does not establish the "once reserved for static optics" clause without a matched static comparator.

Other concerns are minor or acknowledged: champion values are unreplicated (flagged), Eq. 1 uses illustrative costs (flagged), and the co-design thesis is interpretive, which is fine for a review. The absence of a femtosecond-burst LIDT protocol is real and correctly scored open.

Who it is for: anyone selecting beam-shaping hardware for micromachining, and anyone publishing benchmark numbers in this area. It deserves a serious referee, but I would send it back for major revision, mainly to fix the status-quo-ante baselines in Table 4 and soften the collapse language to match the evidence. With that fixed, it could become a standard reference.

Referee Report

3 major / 5 minor

Summary. This critical review reexamines the programmable-versus-static dichotomy in beam shaping for ultrafast laser micromachining and argues that performance is governed by the co-design of optical hardware and computational algorithms rather than by the choice of a single component class. It proposes a seven-axis comparison framework (reconfigurability, average-power and peak-fluence handling, optical efficiency, beam-quality fidelity, three-dimensional programmability, capital cost, and per-pattern computational cost), a documented PRISMA-informed literature screen (234 systematic plus 15 hand-searched sources), and an axis-by-axis, regime-by-regime verdict table. The central claim is that on the average-power axis the historic throughput-flexibility trade-off has collapsed in two regimes: industrial parallel ablation (20-spot, 100 W SLM operation, with pulsed hardware demonstrated to 210 W) and high-throughput two-photon polymerisation (SLM holographic and static DOE-array routes each reaching about 10^8 voxels/s). The trade-off is said to persist elsewhere, the peak-fluence axis is scored explicitly open, and the cost-competitiveness break-even of Eq. (1) is acknowledged as unevaluable from the current literature. The paper closes with six testable milestones and a reporting standard for future demonstrations.

Significance. If its claims survive scrutiny, this review is a valuable contribution to an active industrial field. Its strengths are substantial and explicitly checkable: a falsifiable definition of 'collapse' (sustained operation, single-shot records excluded); a clearly disclosed evidence base with self-citations [13, 14] restricted to specific experimental figures; explicit disclosure that the strongest figures rest on single groups [26, 30]; a robustness argument that sets those figures aside; an honest statement that Eq. (1)'s cost inputs are not reported in the literature and that the peak-fluence axis is open; and a concrete reporting standard that would make future papers comparable. The co-design reframing (hardware and algorithm as one design space) is well supported by the survey of hybrid architectures, camera-in-the-loop systems, and physics-informed DOE design. The main risk is that the headline wording 'once reserved for static optics' is stated more strongly than the assembled comparators support; this is the subject of the major comments.

major comments (3)

[§2, §8, Table 4; Abstract; §9] The collapse verdict is defined in §2 as a programmable device reaching 'a throughput or quality that only static optics could reach before', but the 'Status quo ante' baselines in Table 4 for the two collapsed regimes are serial single-spot baselines, not static multi-spot baselines. For industrial parallel ablation the status quo ante is 'single-spot serial ablation; throughput fixed by the per-spot rate', and Table 2 contains no static-optics ablation row at the 100 W class: the only multi-beam entry, Hofmann et al. [69], is cited without material, wavelength, or power. The cited evidence therefore supports 'SLM multi-spot ablation exceeds serial scanning', and for TPP it supports 'the holographic SLM route is comparable to the contemporary (2024) static DOE route of Kiefer et al. [31]'; it does not establish that the throughputs in question were historically exclusive to static optics. Because the phrase 'once reserved for static optics' recurs in the Abstract, §8, and the Conclusions, this is load-bearing for the paper's central claim. The authors should either supply matched static multi-spot baselines (for example, DOE multi-spot ablation throughput at the 100 W class, or a translation of the §3.6 multi-spot installations into the ablation regime) or re-frame the claim and the Table 4 status quo ante column to state precisely what the evidence demonstrates.
[§8, §2] The evidentiary triage applied to the two strongest records is not applied consistently. Section 8 sets aside the 1.4 kW CW SLM [26] and the 120,000-focus metalens platform [30] as single-group results awaiting replication, then states that 'even with both set aside, the verdicts still hold, resting on Tang's [24] 210 W demonstration'. Tang et al. [24] is itself a single-group, custom-cooled result; §3.2 warns that all three high-power demonstrations 'rely on customised cooling and are single-group results', and the parallel-ablation throughput figure of Lutz et al. [23] is likewise single-group. Given the paper's own falsification condition in §2 ('The average-power collapse would be falsified if the sustained demonstrations fail to replicate'), the authors should state explicitly the minimal evidence set for each collapsed regime and what the verdict becomes if the remaining single-group demonstrations also fail to replicate.
[§5.2 versus Table 4 and §8] Section 5.2 concludes, for surface texturing, that 'its historic trade-off between throughput and flexibility has therefore visibly collapsed on the average-power axis', yet Table 4 consolidates the collapse verdict to exactly two regimes (industrial parallel ablation, parallel two-photon polymerisation) and §8 repeats that restriction, with surface texturing absent from the consolidated verdict. This is an internal inconsistency in the scope of the central claim. The authors should either add surface texturing to Table 4 under the same evidence standard or soften the §5.2 sentence so the verdict logic is uniform throughout the paper.

minor comments (5)

[§8.1] The 'TPP beyond 10^9 voxels per second' milestone (at a voxel below 200 nm) appears already satisfied by Kim and Saha [231], reported in §6.1 as 1.7×10^9 voxels s^-1 with 55 nm features. The 'hologram generation in under a second' milestone for a 256×256×32 volume is also far behind the cited state of the art in §4.3 (real-time DeepCGH inference on 11-megavoxel volumes; 24.89 FPS at 4K). As 'predictions for the coming years', these milestones need explicit qualifying conditions (fabrication-validated, industrially sustained, or including per-pattern energy) or recalibration against the cited literature.
[§3.2] The sentence 'the early-2010s facility deployments read as overcoming the power objection did not transfer beyond their own bespoke cooling' is grammatically incomplete; a connecting clause such as 'but the gains did not transfer' appears to be missing.
[§4.1] The passage 'several days at2563 voxels on a period workstation' appears to have lost a superscript (presumably 256^3 voxels), and 'period workstation' reads as a garbled phrase; please check the typesetting and wording.
[Abstract, §3] The Abstract refers to 'seven beam-shaping technologies', while §3 enumerates six hardware classes and treats acousto-optic deflectors/modulators as outside the taxonomy; Table 1 reaches seven rows only by splitting metasurfaces into passive and active entries. Please reconcile the count.
[Table 4] In the parallel-TPP row, the verdict label 'Collapsed (metalens rung single-study)' appears to conflate two separate bases: the collapse itself rests on the independently reported Zhang [18] and Kiefer [31] routes, while the metalens-array platform is the single-study rung. Consider stating these two claims in separate cells or phrases.

Circularity Check

0 steps flagged · score 0.0 of 10

No significant circularity: all load-bearing verdicts trace to externally cited, independently reported measurements.

full rationale

The paper's central claims are a synthesis of externally cited experimental results, not derivations from its own inputs. The two self-citations [13, 14] are expressly disclosed in Section 2 as 'cited only for specific experimental figures' and are used for individual surface-texturing demonstrations, not as the basis for the throughput-flexibility collapse verdict. The collapse verdict in Section 8 and Table 4 rests on cited measurements from independent groups (Lutz [23], Tang [24], Zhang [18], Kiefer [31]), with the paper itself flagging the single-group nature of [26] and [30] and stating that 'even with both set aside, the verdicts still hold.' Equation 1 is a definitional break-even inequality whose cost inputs are explicitly marked as unevaluated ('n* cannot yet be evaluated'), so no fitted parameter is renamed as a prediction. The six milestones in Section 8.1 are offered as falsifiable targets, not as outputs derived from the review's own framework. The skeptic's concern that Table 4 compares programmable parallel ablation to serial single-spot baselines rather than to matched static multi-spot DOE throughput is a substantive correctness question about whether the 'once reserved for static optics' clause is demonstrated, but it is not a circularity: the comparison is still anchored to external measurements rather than to the review's own assumptions. No step reduces, by the paper's own equations or by self-citation, to its inputs.

Assumptions & free parameters 1 free parameters · 4 assumptions · 0 invented entities

The central claim rests on four borrowed or assumed blocks: the standard scalar-diffraction model, cited process-physics scaling laws, the completeness of the systematic screen for claims of absence, and the composite-envelope reading of Table 1. The only hand-chosen numbers in the paper are the illustrative cost inputs of Eq. 1, which the authors explicitly mark as unevaluated from the literature. No physical entities are introduced, so the entity ledger is empty. The paper's inventions, the seven-axis frame, the collapse-versus-persist verdicts, the six milestones, and the reporting standard, are analytical artifacts with falsifiable handles rather than postulated things, so they do not belong in the entity ledger.

free parameters (1)

Break-even cost inputs Cp, Cs, r (Eq. 1) = Cp ~ EUR 20-40k, Cs ~ EUR 1-5k, r ~ EUR 1-3k, n* in single to low tens
Section 3.6 introduces hand-picked catalogue order-of-magnitude figures to locate the break-even geometry-change count n* = (Cp - Cs)/r. The paper itself states n* cannot yet be evaluated from the literature, so these are illustrative inputs, not fitted constants, and they do not drive the main verdicts.

assumptions (4)

standard math Scalar diffraction and Fresnel propagation as the unifying model for every shaper class (Goodman [47])
Section 3.1 reduces every class to a thin screen t(x,y) multiplying the input field, propagated by the Fresnel integral; all efficiency, fidelity, and 3D-programmability comparisons inherit this model.
domain assumption Cited ablation and process-physics scaling laws: d(F) ~ delta ln(F/Fth), Fopt = e-squared times Fth, plus heat-accumulation, resist-depletion, and plasma-shielding ceilings
Sections 5 and 8 use these laws, cited to [7, 9, 221], to argue that flat-top profiles are the main efficiency lever and to bound where co-design can no longer add throughput.
domain assumption Representativeness of the 2018-2026 PRISMA-informed screen for negative claims
Sections 2 and 8 claim peak-fluence tolerance is uncharacterized for every programmable class and that no energy-per-pattern data exists; these are claims over the whole corpus, and they fail if the screened databases or two-reviewer screening missed qualifying studies.
domain assumption Composite best-in-class envelopes in Table 1 are meaningful design targets
Section 3.6 notes each Table 1 row combines the best published value per axis across different devices, and the comparison and economic arguments assume such composite envelopes represent achievable operating points.

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Cite this review

Pith. "Pith review of Programmable vs. Static Beam Shaping in Ultrafast Laser Micromachining: A Critical Review." pith.science (2026). https://pith.science/paper/QEVED5SX

@misc{pith2026260811861,
  author       = {Pith},
  title        = {Pith review of: Programmable vs. Static Beam Shaping in Ultrafast Laser Micromachining: A Critical Review},
  year         = {2026},
  howpublished = {\url{https://pith.science/paper/QEVED5SX}},
  note         = {Machine review of arXiv:2608.11861}
}

read the original abstract

Beam shaping has become one of the principal determinants of throughput, precision, and process robustness in ultrafast laser micromachining. Despite this, the field is still largely interpreted through a historical distinction between programmable and static optical elements, a framework that increasingly fails to explain recent advances. This review reexamines that perspective and argues that beam shaping should instead be understood as a hardware-algorithm co-design problem. Across high-power spatial light modulators, machine-learning holography, hybrid optical architectures, and massively parallel processing, recent advances converge on the same conclusion: performance depends more on the codesign of optical hardware and computational algorithms than on any individual optical component. To establish a common basis for comparison, seven beam-shaping technologies and five algorithm families are evaluated within a unified seven-axis framework spanning optical performance, programmability, computational cost, and industrial deployment. This analysis identifies where the long-standing trade-off between throughput and flexibility has genuinely disappeared. In industrial parallel ablation and high-throughput two-photon polymerisation, programmable devices now sustain average powers once reserved for static optics, demonstrating why hardware-centred comparisons no longer capture the state of the art. Beyond reviewing recent developments, this work provides a predictive design framework for the next generation of beam-shaping systems. It introduces a benchmarking methodology, practical technology-selection criteria, measurable research milestones, and a reporting standard for improving comparability across future studies.

Figures

Figures reproduced from arXiv: 2608.11861 by the authors.

**Figure 1.** The throughput–flexibility plane. Left: static optics (diffractive optical elements, freeform) occupy the high-throughput, low-flexibility corner and programmable modulators (LCoS-SLM, digital micromirror devices) the high-flexibility, historically low-throughput corner, separated by the historic frontier (grey dashed). Three developments of the last three years push it outward (green dashed): higher average power (… view at source ↗

**Figure 2.** PRISMA-style flow of the literature search. Records from four databases and a preprint check were de-duplicated to 290, then screened to 234 cited sources. A further 15 hand-searched sources bring the total to 249. The lower row groups the 234 cited records by chapter. 3 SLM hardware and competing modulators Six hardware classes now compete to program a laser wavefront: liquid-crystal-on-silicon spatial light modula… view at source ↗

**Figure 3.** Cross-sections of the four principal hardware classes. (a) LCoS-SLM: a voltage tilts the nematic-LC director [4, 59]. (b) DMD: a bistable torsion-hinge micromirror [48, 60]. (c) Deformable mirror: a piezo-actuated cooled faceplate [61, 62]. (d) Metasurface: rotated meta-atoms imparting a Pancharatnam–Berry phase φ = 2θ [49, 63, 64]. 3.2 Liquid-crystal-on-silicon SLMs The phase-only LCoS-SLM uses the field-controlled… view at source ↗

Figures from the paper (11 more)

**Figure 4.** Figure 4: Published average-power ceiling for LCoS-SLM beam shapers, 2010–2025. Grey circles: historic demonstrations under the decade-long ≲ 130 W ceiling [3, 23, 69–71, 74, 75]. Filled square: pulsed record, Tang et al. (210 W) [24]; open squares: CW-only Zuo et al. (383 W) [2…

**Figure 5.** Figure 5: Emerging flat-optics and reconfigurable metasurfaces. (i) Scalable flat optics designed by an evolutionary neural network on a flexible Kapton/glass substrate, shown bent by hand with an SEM of the silicon-nanorod array. (ii) A metasurface cascaded with two liquid lens…

**Figure 6.** Figure 6: Hardware classes in the refresh-rate–average-power (F–P) plane. Static (F = 0) classes fill the left strip, and each bubble marks a published operating envelope. Two recent migrations dominate: LCoS-SLM upward in power [24–26] and DOE upward in refresh via ML re-design…

**Figure 7.** Figure 7: Architectures of the five hologram-generation families. (a) Iterative Gerchberg–Saxton resets the amplitude to the known constraint on each pass between the modulator and target planes. (b) Gradient descent optimises the phase map directly for a single target. (c) Deep…

**Figure 8.** Figure 8: Reconstruction quality of the main phase-retrieval families on shared beam-shaping targets (rows: chair, tear, rectangular and circular flat-top, ring, Gaussian). Columns compare deep-unrolling FourierGSNet against direct GS unrolling, SiSPRNet, deep-CDI, gradient desc…

**Figure 9.** Figure 9: SLM-driven micromachining, from in-volume cutting to functional surface texturing. (i) Stealth dicing in N-type SiC, modification confined below 20 µm. (ii) GHz- versus MHz-burst Bessel cutting of glass. (iii) Anti-adhesion LIPSS microgrooves in steel. (iv) Adaptive-sh…

**Figure 10.** Figure 10: TPP process overview. (a–c) Three parallel-writing routes: reconfigurable holographic multi-foci on an LCoS-SLM, a fixed DOE- or metalens-defined focus array, and single-exposure DMD projection. (d–e) In-volume aberration correction: an uncorrected voxel elongated and…

**Figure 11.** Figure 11: Demonstrations of parallel two-photon polymerisation. (i) A DOE-plus-microlens-array optic for 7 × 7 writing, with SEM close-ups of the written structures. (ii) DMD single-exposure projection of nanoporous woodpiles, with feature (< 300 nm) and pore (< 700 nm) sizes m…

**Figure 12.** Figure 12: The four hybrid beam-shaping architectures. Each stacks two or more layers so that a later layer relaxes a constraint of the one before it, reaching a throughput and flexibility neither layer holds alone. 7.1 SLM + DOE cascades The foundational hybrid pairs a programm…

**Figure 13.** Figure 13: Two hybrid architectures from recent work. (i) A geometric metasurface as the static shaping layer in a metasurface + SLM stack: two 6 mm silica disks with their fast-axis maps and greater than 99 % near-infrared transmission. (ii) End-to-end model-driven learning (SM…

**Figure 14.** Figure 14: Spatiotemporally co-shaped processing. (i) LIPSS written simultaneously with orthogonal polarisations on stainless steel on a two-SLM pulse-burst platform, shown at three magnifications. (ii) Spatiotemporally focused fs writing of almost isotropic 3D microchannels in …

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