Modelling of Statistical Low-Frequency Noise of Deep-Submicron MOSFETs

The low-frequency noise (LF-noise) of deep submicron MOSFETs is experimentally studied with special emphasis on yield relevant parameter scattering. A novel modeling approach is developed which includes detailed consideration of statistical effects. The model is based on device physics-based parameters which cause statistical fluctuations in LF-noise behavior of individual devices. It can easily be implemented in a compact model for use in circuit simulation tools.