Pith Number

pith:573RUNCQ

pith:2026:573RUNCQQW5RZ4E3A2TNTGCG3I

not attested not anchored not stored refs pending

Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing

Hyunwoong Ko, Suk Ki Lee, Tao Han

arxiv:2606.00923 v1 · 2026-05-30 · cs.CE

Open paper page JSON Open Graph Bundle Merged state Verified badge What is a Pith Number?

Add to your LaTeX paper

\usepackage{pith}
\pithnumber{573RUNCQQW5RZ4E3A2TNTGCG3I}

Prints a linked badge after your title and injects PDF metadata. Compiles on arXiv. Learn more · Embed verified badge

Record completeness

1 Bitcoin timestamp

2 Internet Archive

3 Author claim open · sign in to claim

4 Citations open

5 Replications open

✓ Portable graph bundle live · download bundle · merged state

The bundle contains the canonical record plus signed events. A mirror can host it anywhere and recompute the same current state with the deterministic merge algorithm.

Receipt and verification

First computed	2026-06-02T01:04:09.572918Z
Builder	pith-number-builder-2026-05-17-v1
Signature	Pith Ed25519 (`pith-v1-2026-05`) · public key
Schema	pith-number/v1.0

Canonical hash

eff71a345085bb1cf09b06a6d99846da0dbecf4fba7bae8d2a89a4534a629bec

Aliases

arxiv: 2606.00923 · arxiv_version: 2606.00923v1 · doi: 10.48550/arxiv.2606.00923 · pith_short_12: 573RUNCQQW5R · pith_short_16: 573RUNCQQW5RZ4E3 · pith_short_8: 573RUNCQ

Agent API

Resolver JSON Graph JSON Events JSON Schema Signing key

Verify this Pith Number yourself

curl -sH 'Accept: application/ld+json' https://pith.science/pith/573RUNCQQW5RZ4E3A2TNTGCG3I \
  | jq -c '.canonical_record' \
  | python3 -c "import sys,json,hashlib; b=json.dumps(json.loads(sys.stdin.read()), sort_keys=True, separators=(',',':'), ensure_ascii=False).encode(); print(hashlib.sha256(b).hexdigest())"
# expect: eff71a345085bb1cf09b06a6d99846da0dbecf4fba7bae8d2a89a4534a629bec

Canonical record JSON

{
  "metadata": {
    "abstract_canon_sha256": "66b3de8f4f9fb3346987a056a592362f3d8aa9bb64e22448afcfa0a55ecd45d5",
    "cross_cats_sorted": [],
    "license": "http://arxiv.org/licenses/nonexclusive-distrib/1.0/",
    "primary_cat": "cs.CE",
    "submitted_at": "2026-05-30T23:18:32Z",
    "title_canon_sha256": "652ad5f6fc1fd323c4a5267fb9d1cb785fa7ca1a7bf0a9632093c734c94d3e7f"
  },
  "schema_version": "1.0",
  "source": {
    "id": "2606.00923",
    "kind": "arxiv",
    "version": 1
  }
}