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Pith Number

pith:MMRQLGS5

pith:2011:MMRQLGS5QU7P54J7EZYYJ5GAZN
not attested not anchored not stored refs pending

Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations

A. Kato, C. Laubis, F. Schmidt, F. Scholze, J. Pomplun, L. Zschiedrich, S. Burger

arxiv:1110.4760 v1 · 2011-10-21 · physics.optics · physics.comp-ph

Add to your LaTeX paper
\usepackage{pith}
\pithnumber{MMRQLGS5QU7P54J7EZYYJ5GAZN}

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Record completeness

1 Bitcoin timestamp
2 Internet Archive
3 Author claim open · sign in to claim
4 Citations open
5 Replications open
Portable graph bundle live · download bundle · merged state
The bundle contains the canonical record plus signed events. A mirror can host it anywhere and recompute the same current state with the deterministic merge algorithm.
Receipt and verification
First computed 2026-05-18T04:10:35.079505Z
Builder pith-number-builder-2026-05-17-v1
Signature Pith Ed25519 (pith-v1-2026-05) · public key
Schema pith-number/v1.0

Canonical hash

6323059a5d853efef13f267184f4c0cb694f103f326073886a2fe3c088fae856

Aliases

arxiv: 1110.4760 · arxiv_version: 1110.4760v1 · doi: 10.48550/arxiv.1110.4760 · pith_short_12: MMRQLGS5QU7P · pith_short_16: MMRQLGS5QU7P54J7 · pith_short_8: MMRQLGS5
Agent API
Verify this Pith Number yourself
curl -sH 'Accept: application/ld+json' https://pith.science/pith/MMRQLGS5QU7P54J7EZYYJ5GAZN \
  | jq -c '.canonical_record' \
  | python3 -c "import sys,json,hashlib; b=json.dumps(json.loads(sys.stdin.read()), sort_keys=True, separators=(',',':'), ensure_ascii=False).encode(); print(hashlib.sha256(b).hexdigest())"
# expect: 6323059a5d853efef13f267184f4c0cb694f103f326073886a2fe3c088fae856
Canonical record JSON
{
  "metadata": {
    "abstract_canon_sha256": "303d79acab27345ad092f91b6c0503c23c3dc1522d9270eacf4411575f5c755a",
    "cross_cats_sorted": [
      "physics.comp-ph"
    ],
    "license": "http://arxiv.org/licenses/nonexclusive-distrib/1.0/",
    "primary_cat": "physics.optics",
    "submitted_at": "2011-10-21T11:36:07Z",
    "title_canon_sha256": "ae5fbedb79b34167491003cabe20e01eb709782976454bb653de7a8497a4aa4d"
  },
  "schema_version": "1.0",
  "source": {
    "id": "1110.4760",
    "kind": "arxiv",
    "version": 1
  }
}