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R. K\"ohle

Identifiers

  • name variant R. K\"ohle 0.60 · backfill

Papers (4)

  1. Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns physics.optics · 2007 · author #4
  2. 3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method physics.optics · 2007 · author #4
  3. Rigorous Simulation of 3D Masks physics.optics · 2006 · author #2
  4. Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation physics.optics · 2006 · author #2

Mentions

  • 0709.3934 #4 · backfill · confidence 0.70 R. K\"ohle
  • 0705.2292 #4 · backfill · confidence 0.70 R. K\"ohle

Frequent Coauthors