R. M\"arz

Identifiers

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Papers (2)

1. Rigorous Simulation of 3D Masks physics.optics · 2006 · author #6
2. Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation physics.optics · 2006 · author #6

Mentions

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Frequent Coauthors

• C. N\"olscher 2 shared papers
• F. Schmidt 2 shared papers
• L. Zschiedrich 2 shared papers
• R. K\"ohle 2 shared papers
• S. Burger 2 shared papers
• H. Nguyen 1 shared papers
• W. Gao 1 shared papers