C. Laubis

Identifiers

• name variant C. Laubis 0.60 · backfill

Papers (3)

1. Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations physics.optics · 2011 · author #6
2. Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis physics.optics · 2010 · author #5
3. Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters physics.optics · 2006 · author #6

Mentions

• 1110.4760 #6 · backfill · confidence 0.70 C. Laubis
• 1011.2665 #5 · backfill · confidence 0.70 C. Laubis

Frequent Coauthors

• F. Schmidt 3 shared papers
• F. Scholze 3 shared papers
• J. Pomplun 3 shared papers
• S. Burger 3 shared papers
• L. Zschiedrich 2 shared papers
• U. Dersch 2 shared papers
• A. Kato 1 shared papers