Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.
D.et al.Monolithically integrated multilayer silicon nitride-on-silicon waveguide platforms for 3-d pho- tonic circuits and devices.Proceedings of the IEEE106, 2232–2245 (2018)
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
physics.optics 1years
2026 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
Building reliable 3D photonic integrated circuits and cavities at the wafer scale
Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.