A pick-and-place bonded 95 mg platinum sphere on a silicon nitride trampoline yields a chip-integrated accelerometer with 5.5 ng/√Hz peak sensitivity at 117 Hz in air.
Langfelder , author M
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Precision optomechanical accelerometer via hybrid test mass integration
A pick-and-place bonded 95 mg platinum sphere on a silicon nitride trampoline yields a chip-integrated accelerometer with 5.5 ng/√Hz peak sensitivity at 117 Hz in air.