Nanopatterned silicon membranes with 63 nm pitch holes achieve tunable thermal conductivity down to 7.3 W/m.K via controlled etching, validated with an improved three-probe measurement technique on 40 nm films.
Nanostructured planar-type uni-leg Si thermoelectric generators.Applied Physics Express2020,13, 095001
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Thermal conductivity tuning of scalable nanopatterned silicon membranes measured with a three-probe method
Nanopatterned silicon membranes with 63 nm pitch holes achieve tunable thermal conductivity down to 7.3 W/m.K via controlled etching, validated with an improved three-probe measurement technique on 40 nm films.