Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.
Vepřek, The search for novel, superhard materials, Journal of Vacuum Science & Technology A 17 (1999) 2401–2420
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A correlation of structural changes with nanomechanical properties in TiN-AlN multilayer films
Phase transformation in AlN layers of TiN-AlN multilayers above 3 nm thickness leads to stabilized mechanical properties and improved damage tolerance.