A pick-and-place bonded 95 mg platinum sphere on a silicon nitride trampoline yields a chip-integrated accelerometer with 5.5 ng/√Hz peak sensitivity at 117 Hz in air.
Ultrahigh-Q Torsional Nanomechanics through Bayesian Optimization
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abstract
Recently it was discovered that torsion modes of strained nanoribbons exhibit dissipation dilution, giving a route to enhanced torque sensing and quantum optomechanics experiments. As with all strained nanomechanical resonators, an important limitation is bending loss due to mode curvature at the clamps. Here we use Bayesian optimization to design nanoribbons with optimal dissipation dilution of the fundamental torsion mode. Applied to centimeter-scale Si$_3$N$_4$ nanoribbons, we realize $Q$ factors exceeding 100 million and $Q$-frequency products exceeding $10^{13}$ Hz at room temperature. The thermal torque sensitivity of the reported devices is at the level of $10^{-20}\;\text{N}\,\text{m}/\sqrt{\text{Hz}}$ and the zero point angular displacement spectral density is at the level of $10^{-10}\;\text{rad}/\sqrt{\text{Hz}}$; they are moreover simple to fabricate, have high thermal conductivity, and can be heavily mass-loaded without diminishing their $Q$, making them attractive for diverse fundamental and applied weak force sensing tasks.
fields
physics.app-ph 1years
2025 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
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Precision optomechanical accelerometer via hybrid test mass integration
A pick-and-place bonded 95 mg platinum sphere on a silicon nitride trampoline yields a chip-integrated accelerometer with 5.5 ng/√Hz peak sensitivity at 117 Hz in air.