A coaxial cylindrical capacitive argon discharge shows a roughly threefold plasma density increase and an EEDF shape change when an axial magnetic field is raised to 60 G.
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Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge
A coaxial cylindrical capacitive argon discharge shows a roughly threefold plasma density increase and an EEDF shape change when an axial magnetic field is raised to 60 G.