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Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge

T0 review · 3 major / 5 minor · reviewed 2026-08-11 · deepseek-v4-flash

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Pith's one-line read An axial magnetic field of up to 60 G triples the measured plasma density in a coaxial cylindrical capacitive discharge.

desk verdict Promising new symmetric coaxial-cylinder CCP with axial B, but the central density and EEDF claims rest on an uncorrected probe analysis in a magnetized plasma and a global model that has no B dependence. read the letter →

arxiv 2412.08155 v1 pith:6WYY45F4 submitted 2024-12-11 physics.plasm-ph

Akanshu Khandelwal , Dhyey Raval , Narayan Sharma , Yashashri Patil , Sarveshwar Sharma , Shantanu Karkari , Nishant Sirsea This is my paper · ORCID
classification physics.plasm-ph PACS 52.80.Pi52.70.Ds
keywords capacitivelycoupledplasmacylindricalelectrodesaxialmagneticfieldE×BconfinementelectronenergydistributionfunctionsecondharmonictechniqueLangmuirprobeargondischarge
verification ladder T0 review T1 audit T2 compute T3 formal

The pith

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

The reading

This paper reports that a modest axial magnetic field, 0 to 60 G, roughly triples the plasma density in a cylindrical capacitively coupled argon discharge formed between two coaxial cylinders while RF power is held at 20 W. The authors built a nearly geometrically symmetric source in which a radial RF electric field and an axial magnetic field combine to create a closed E×B drift in the azimuthal direction; they argue this traps hot electrons in the 5 cm annular gap and reduces radial electron loss, raising the measured density to about $1.8\times10^{16}$ m$^{-3}$ and the ionization fraction from about 0.5% to 1.8%. They also measured the electron energy distribution function directly with a second-harmonic Langmuir-probe circuit and report that increasing the magnetic field changes the EEDF from Maxwellian-like to Druyvesteyn-like, meaning the high-energy tail is depleted. The work matters because if the effect is genuine, it offers a way to increase plasma density and control the electron energy distribution without increasing RF power, which is relevant to plasma processing and ion source design.

What carries the argument

The load-bearing mechanism is the closed azimuthal E×B drift produced by the radial electric field and axial magnetic field between the coaxial cylinders, which traps electrons in the annular gap and reduces their radial loss to the electrodes. At 10 G, a 15 eV electron has gyro-frequency about 28 MHz and gyro-radius about 13 mm, comparable to the 5 cm gap, so hot electrons are magnetized while argon ions, with gyro-radius about 200 mm, are not. The diagnostic machinery is an RF-compensated Langmuir probe with its tip inserted perpendicular to the magnetic field to maximize collection area, plus a second-harmonic circuit that measures $d^2I/dV^2$ directly; the EEDF then follows from the Druyvesteyn relation, which connects the second derivative of probe current to the electron energy distribution. Particle and power balance equations for argon supply the comparison values for density and temperature.

What would settle it

Re-measure the density and EEDF with a magnetically insensitive diagnostic, such as a microwave interferometer for line-integrated density, or apply a magnetic-field correction to the probe's effective collection area in the Druyvesteyn analysis. If the corrected density at 60 G is no longer about three times the value at 0 G, or if the corrected EEDF keeps its Maxwellian shape, the central claims would be refuted. A simpler check is to rotate the probe tip parallel to the field: a genuine plasma property should not depend on probe orientation.

Watch

Extended reading notes

Core claim

The central claim is that electron magnetization in the annular region of a coaxial cylindrical CCP discharge enhances plasma density through closed azimuthal E×B drift. At 20 W and 1 Pa, the measured electron density rises from about $4.8\times10^{15}$ m$^{-3}$ at $B=0$ to about $1.8\times10^{16}$ m$^{-3}$ at 60 G, a threefold increase, while the electron temperature remains near 3 eV with only a slight rise. The measured EEDF evolves from a near-Maxwellian shape to a Druyvesteyn-like shape as the field increases; the authors attribute this to hot electrons being lost to the walls and electrodes while low- and mid-energy electrons accumulate through collisions. They also find that the plasma potential falls from roughly 56 V to 26 V as $B$ rises to 60 G, consistent with reduced electron loss, and their global-model calculation reproduces the measured electron temperature, with the density discrepancy explained by RF power losses in the matching network and cabling.

Load-bearing premise

The load-bearing premise is that the Langmuir probe's current-voltage curve and effective collection area are essentially unaffected by the magnetic field; if the probe collects electrons differently at 60 G than at 0 G, the reported threefold density rise and the EEDF shape change could be partly or wholly instrumental.

Editorial extensions

If this is right

  • At fixed 20 W and 1 Pa, raising the axial field from 0 to 60 G increases the measured plasma density by about threefold, to roughly $1.8\times10^{16}$ m$^{-3}$.
  • Electron temperature stays near 3 eV as RF power is varied from 20 to 100 W, while density approximately doubles over the same range.
  • Applying the magnetic field shifts the measured EEDF from Maxwellian-like to Druyvesteyn-like, indicating a relative depletion of the high-energy electron tail.
  • Plasma potential drops from about 56 V to 26 V as the field reaches 60 G, consistent with magnetically reduced electron loss to the grounded electrode.
  • A global particle-and-power-balance model for argon yields the observed electron temperature and the correct density trend, with the experimental density lower mainly because of RF delivery losses.

Reading between the lines

Editorial extensions of the paper, not claims the author makes directly.

  • If confirmed, the threefold density gain at fixed power implies that annular E×B confinement could serve as a low-power density booster for ion sources and plasma processing, decoupling density from RF power.
  • If confirmed, the Maxwellian-to-Druyvesteyn EEDF transition would change electron-impact chemistry with magnetic field: high-threshold reactions such as ionization and dissociation would slow relative to low-energy excitation, a prediction testable through optical emission ratios.
  • A natural next test is to scan the field beyond 60 G; the reported near-linear density rise should either saturate once the electron gyro-radius becomes much smaller than the probe and gap dimensions, or continue until ion magnetization sets in.
  • An independent density calibration, for example by microwave interferometry or by a magnetic-field-corrected probe model, would separate the confinement effect from probe artifacts.
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Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, and a circularity audit.

Referee Report

3 major / 5 minor

Summary. The paper reports an experimental study of a novel, nearly symmetric capacitively coupled plasma (CCP) discharge formed in the annular gap between two coaxial cylindrical electrodes, with an axial magnetic field up to 60 G. Using an in-house RF-compensated Langmuir probe and the second harmonic technique (SHT), the authors measure plasma density, electron temperature, plasma potential, and the electron energy distribution function (EEDF) in argon at 1 Pa and 3 Pa. They report that the plasma density rises approximately twofold when RF power increases from 20 to 100 W at B = 0, and that applying an axial magnetic field from 0 to 60 G at 20 W raises the measured density about threefold, to ~1.8e16 m^-3. They also report that the EEDF remains approximately Maxwellian with RF power but transitions toward a Druyvesteyn-like shape as B increases. The experimental density and temperature at B = 0 are compared with a global particle-and-power-balance model, using external argon rate coefficients and an assumed 50% power transfer efficiency. The central physical claim is that the axisymmetric E x B drift confines electrons in the azimuthal direction, reducing radial losses and thereby increasing plasma density without increasing RF power.

Significance. If the reported B-field effect is real, the device offers a useful geometry for achieving higher-density CCP operation with improved radial uniformity, relevant to plasma processing and ion sources. The paper has clear strengths: the plasma source is a new configuration, the diagnostics are built in-house, and the EEDF measurements are direct (SHT) rather than inferred from numerical differentiation. The density/temperature comparison with the global model uses externally published rate coefficients and does not fit parameters to the measured data, which is commendable. However, the load-bearing B-field results rest entirely on a Langmuir probe analysis that assumes an unmagnetized, constant-collection-area response, while the global model used for 'verification' contains no magnetic-field dependence. These gaps substantially weaken the support for the central claim as currently written.

major comments (3)
  1. [Sec. 2.3 and Eqs. (4)-(6)] The central density and EEDF results at B > 0 are obtained by applying the unmagnetized Druyvesteyn relation, Eq. (4), with a constant geometric probe area A, and then integrating in Eqs. (5) and (6). In a magnetized plasma the effective electron collection area of a cylindrical Langmuir probe is B-dependent and energy-dependent; the authors themselves cite Refs. [61,62] on this topic but do not apply any correction. At 60 G the gyro-radius of a 15 eV electron is about 2.2 mm (scaling from the authors' 13 mm at 10 G), which is comparable to the 6 mm probe tip length and much larger than the 0.1 mm diameter. A B-dependent distortion of the I-V curve or of the effective collection area would change both the density computed from Eq. (5) and the apparent EEDF shape inferred from Eq. (4). Therefore the reported threefold density rise and the Maxwellian-to-Druyvesteyn transition could be at least partly probe artifacts. The paper needs either an explicit magnetized-probe correction with justification, or an independent density measurement (e.g., microwave interferometry) to support the central claim.
  2. [Sec. 3 and Eqs. (7)-(8)] The abstract and conclusion state that the effect of the external magnetic field is 'verified' by particle and energy balance equations, but Eqs. (7) and (8) contain no magnetic field term, and the comparison in Fig. 7 is only for B = 0. Consequently the global model provides no verification of the B-induced density rise; it only reproduces the B = 0 power trend. The B-dependent density and EEDF claims therefore rest solely on the uncorrected Langmuir probe data, making the missing probe correction even more consequential.
  3. [Sec. 3, Fig. 7] In the power-balance comparison, the authors assume a power transfer efficiency of approximately 50% and set Pabs accordingly in Eq. (8), but this efficiency is not measured and no reference is given. Because Eq. (8) is linear in Pabs, the assumed value directly determines the absolute density comparison in Fig. 7(a). The qualitative agreement in the power trend is useful, but the 'good correlation' claimed is not a parameter-free validation. The authors should either measure the delivered power, or clearly label the 50% factor as an adjustable parameter and discuss how the comparison changes with that assumption.
minor comments (5)
  1. [Sec. 3, Fig. 9] The text describing Fig. 9(b) says the EEDF is measured at 100 W RF power, while the figure caption says 20 W at fixed pressure; please correct the inconsistency.
  2. [Sec. 2.4] The phrase 'Tailor expansion' should be 'Taylor expansion' in the sentence before Eq. (3).
  3. [Sec. 4] The conclusion states that the axial magnetic field is applied up to 80 G, but the experimental results only go to 60 G; please align the stated range with the data.
  4. [Sec. 3, Fig. 8] The ionization percentage quoted as '~0.5 percent to ~1.8 percent' appears inconsistent with the neutral density at 1 Pa (about 2.4e20 m^-3) and the measured electron densities (e15 to e16 m^-3), which would correspond to fractions of about 0.005% to 0.008%; please verify the definition or the numbers.
  5. [Sec. 2.2] The sentence 'Ec is calculated for different values of Te as and is plotted in as shown in Fig.6' contains a grammatical error; please rephrase.

Circularity Check

0 steps flagged · score 0.0 of 10

No significant circularity: the central B-field density and EEDF claims are direct measurements, and the global-model comparison uses external rate coefficients.

full rationale

The paper's central results—the threefold density rise with 0–60 G and the Maxwellian-to-Druyvesteyn EEDF transition—are obtained from the RF-compensated Langmuir probe via the second-harmonic technique (Eqs. 2–6), not from the global model. No parameter is fitted to these measured data to generate them; the probe area A is the geometric value stated in Sec. 2.3. The global model (Eqs. 7–9) uses literature rate coefficients from Lieberman, Tachibana, and Eggarter and contains no magnetic-field term, so it cannot be the source of the magnetized-plasma claims; it is used only as a B = 0 consistency check for the power trend in Fig. 7. The unexplained 'approximately 50 percent' power-transfer efficiency is a post hoc magnitude reconciliation and weakens the model comparison as independent validation, but it is not a fitted input that manufactures the measured density or EEDF shape. The unmagnetized Druyvesteyn analysis with a constant probe area in a magnetized plasma is a missing correction and a correctness risk (gyro-radii comparable to the tip), not a circular definition. Self-citations to prior cylindrical-CCP work are background context, not load-bearing derivations. Therefore the derivation chain is self-contained with respect to the inputs and no circular step is exhibited.

Assumptions & free parameters 1 free parameters · 5 assumptions · 0 invented entities

The central claim depends on standard probe diagnostics and external argon rate coefficients. The paper introduces no fitted constants into the global model, but the assumed 50 percent power efficiency is an unmeasured reconciliation constant. The main unstated assumptions are the validity of unmagnetized Druyvesteyn analysis in a magnetized plasma, the truncation of the SHT series, and the applicability of a B-free global model to a magnetized discharge.

free parameters (1)
  • Power transfer efficiency = ~50% (assumed)
    In Section 3, the authors state that approximately 50 percent of generator power is lost before reaching the plasma and use this to explain why measured density is below the global model value. The efficiency is not measured and is not included in the model curve, so it acts as an unverified reconciliation constant.
assumptions (5)
  • domain assumption The Langmuir probe I-V curve in a magnetic field can be interpreted with the unmagnetized Druyvesteyn relation, provided the tip is perpendicular to B.
    Section 2.3 and Eq. (4). No correction for magnetic field effects on collection area or distribution isotropy is applied.
  • domain assumption The SHT second harmonic amplitude is dominated by d2I/dV2; fourth and higher derivatives are negligible for Vac = 2 V.
    Section 2.4, Eq. (3). The paper states Vac is kept low but does not quantify the truncation error for Te near 3 eV.
  • domain assumption A volume-averaged global model with no magnetic field term is applicable to this magnetized annular discharge.
    Section 3, Eqs. (7) and (8). The model contains no B dependence, yet it is used to verify the magnetic-field-driven density rise.
  • domain assumption The axial magnetic field is uniform over the electrode assembly.
    Section 2.2, Fig. 2(a). Field is measured along the axis; radial uniformity is not shown.
  • domain assumption Argon excitation, ionization, and elastic rate coefficients from Lieberman and Lichtenberg [8], Tachibana [73], and Eggarter [74] are accurate.
    Used in Eq. (9) to compute collisional energy loss; these are external literature inputs, not derived in the paper.

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Pith. "Pith review of Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge." pith.science (2026). https://pith.science/paper/6WYY45F4

@misc{pith2026241208155,
  author       = {Pith},
  title        = {Pith review of: Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge},
  year         = {2026},
  howpublished = {\url{https://pith.science/paper/6WYY45F4}},
  note         = {Machine review of arXiv:2412.08155}
}
read the original abstract

This work investigates the discharge properties of a cylindrical magnetized capacitive coupled plasma discharge produced between a pair of coaxial cylinders. For the purpose of diagnosing plasma properties and electron energy distribution function (EEDF), an in-house electronic circuit and an RF-compensated Langmuir probe are devised and constructed. The second harmonic technique (SHT) has been applied to obtain the direct measurement of EEDF and evaluated the effect of RF electron magnetization on the bulk plasma heating within the discharge. The effect of external magnetic field on the overall rise in plasma properties has been verified by use of particle and energy balance equations derived for argon discharge.

Figures

Figures reproduced from arXiv: 2412.08155 by the authors.

Figure 6
Figure 6. Fig.6. Plot of the variation of collisional energy lost per electron [PITH_FULL_IMAGE:figures/full_fig_p012_6.png] view at source ↗

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Works this paper leans on

63 extracted references · 51 canonical work pages

  1. [1]

    Bogaerts, R

    A. Bogaerts, R. Gijbels, W. Goedheer, Comparison between a radio -frequency and direct current glow discharge in argon by a hybrid Monte Carlo –fluid model for electrons, argon ions and fast argon atoms, Spectrochim. Acta Part B At. Spectrosc. 54 (1999) 1335–1350. https://doi.org/10.1016/S0584 -8547(99)00080-4

    work page doi:10.1016/s0584 1999

  2. [2]

    Bogaerts, R

    A. Bogaerts, R. Gijbels, Similarities and differences between direct current and radio - frequency glow discharges: a mathematical simulation, J. Anal. At. Spectrom. 15 (2000) 1191–1201. https://doi.org/10.1039/b000519n

    work page doi:10.1039/b000519n 2000

  3. [3]

    S. Kong, K. Minami, M. Esashi, Fabrication of Reactive Ion Etching Systems for Deep Silicon Machining, IEEJ Trans. Sens. Micromachines 117 (1996) 10 –14. https://doi.org/10.1541/ieejsmas.117.10

    work page doi:10.1541/ieejsmas.117.10 1996

  4. [4]

    Godyak, Sov

    V.A. Godyak, Sov. J. Plasma Phys. 2 (1976) 78

    work page 1976

  5. [5]

    Popov, V.A

    O.A. Popov, V.A. Godyak, Power dissipated in low -pressure radio-frequency discharge plasmas, J. Appl. Phys. 57 (1985) 53 –58. https://doi.org/10.1063/1.335395

    doi:10.1063/1.335395 1985

  6. [6]

    Perret, P

    A. Perret, P. Chabert, J. Jolly, J. -P. Booth, Ion energy uniformity in high -frequency capacitive discharges, Appl. Phys. Lett. 86 (2005) 021501. https://doi.org/10.1063/1.1848183

    work page doi:10.1063/1.1848183 2005

  7. [8]

    Lieberman, A.J

    M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 1st ed., Wiley, 2005. https://doi.org/10.1002/0471724254

    doi:10.1002/0471724254 2005

  8. [9]

    Chabert, N

    P. Chabert, N. Braithwaite, Physics of Radio -Frequency Plasmas, (n.d.)

    work page

Show all 63 references
  1. [10]

    Goto, H.-D

    H.H. Goto, H.-D. Lowe, T. Ohmi, Independent Control of Ion Density and Ion Bombardment Energy in a Dual RF Excitation Plasma, 6 (1993)

    1993

  2. [11]

    Kim, J.K

    H.C. Kim, J.K. Lee, J.W. Shon, Analytic model for a dual frequency capacitive discharge, Phys. Plasmas 10 (2003) 4545–4551. https://doi.org/10.1063/1.1621000

    2003 doi

  3. [13]

    Karkari, A.R

    S.K. Karkari, A.R. Ellingboe, C. Gaman, Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma, Appl. Phys. Lett. 93 (2008) 071501. https://doi.org/10.1063/1.2971236

    2008 doi

  4. [15]

    Kitajima, Y

    T. Kitajima, Y. Takeo, Z.Lj. Petrović, T. Makabe, Functional separation of biasing and sustaining voltages in two -frequency capacitively coupled plasma, Appl. Phys. Lett. 77 (2000) 489–491. https://doi.org/10.1063/1.127020

    2000 doi

  5. [16]

    Denda, Y

    T. Denda, Y. Miyoshi, Y. Komukai, T. Goto, Z.Lj. Petrović, T. Makabe, Functional separation in two frequency operation of an inductively coupled plasma, J. Appl. Phys. 95 (2004) 870–876. https://doi.org/10.1063/1.1636527

    2004 doi

  6. [17]

    Makabe, Z.Lj

    T. Makabe, Z.Lj. Petrovic, Plasma Electronics: Applications in Microelectronic Device Fabrication, 0 ed., CRC Press, 2014. https://doi.org/10.1201/b17322

    2014 doi

  7. [18]

    Georgieva, A

    V. Georgieva, A. Bogaerts, Numerical simulation of dual frequency etching reactors: Influence of the external process parameters on the plasma characteristics, J. Appl. Phys. 98 (2005) 023308. https://doi.org/10.1063/1.1989439

    2005 doi

  8. [19]

    A.C.F. Wu, M.A. Lieberman, J.P. Verboncoeur, A method for computing ion energy distributions for multifrequency capacitive discharges, J. Appl. Phys. 101 (2007) 056105. https://doi.org/10.1063/1.2435975

    2007 doi

  9. [20]

    Sharma, S.K

    S. Sharma, S.K. Mishra, P.K. Kaw, M.M. Turner, The effect of intermediate frequency on sheath dynamics in collisionless current driven triple frequency capacitive plasmas, Phys. Plasmas 24 (2017) 013509. https://doi.org/10.1063/1.4973889

    2017 doi

  10. [21]

    Lafleur, J.P

    T. Lafleur, J.P. Booth, Control of the ion flux and ion energy in CCP discharges using non - sinusoidal voltage waveforms, J. Phys. Appl. Phys. 45 (2012) 395203. https://doi.org/10.1088/0022 -3727/45/39/395203

    2012 doi

  11. [22]

    Economou, Tailored ion energy distributions on plasma electrodes, J

    D.J. Economou, Tailored ion energy distributions on plasma electrodes, J. Vac. Sci. Technol. Vac. Surf. Films 31 (2013) 050823. https://doi.org/10.1116/1.4819315

    2013 doi

  12. [26]

    Sharma, N

    S. Sharma, N. Sirse, A. Kuley, M.M. Turner, Ion energy distribution function in very high frequency capacitive discharges excited by saw -tooth waveform, Phys. Plasmas 28 (2021) 103502. https://doi.org/10.1063/5.0061605

    2021 doi

  13. [28]

    Abdel-Fattah, H

    E. Abdel-Fattah, H. Sugai, Electron heating mode transition observed in a very high frequency capacitive discharge, Appl. Phys. Lett. 83 (2003) 1533 –1535. https://doi.org/10.1063/1.1604941

    2003 doi

  14. [30]

    Sharma, N

    S. Sharma, N. Sirse, P.K. Kaw, M.M. Turner, A.R. Ellingboe, Effect of driving frequency on the electron energy distribution function and electron -sheath interaction in a low pressure capacitively coupled plasma, Phys. Plasmas 23 (2016) 110701. https://doi. org/10.1063/1.4967356

    2016 doi

  15. [31]

    Sharma, N

    S. Sharma, N. Sirse, M.M. Turner, A.R. Ellingboe, Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge, Phys. Plasmas 25 (2018) 063501. https://doi.org/10.1063/1. 5031221

    2018 doi

  16. [35]

    Sharma, N

    S. Sharma, N. Sirse, A. Sen, M.M. Turner, A.R. Ellingboe, Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges, Phys. Plasmas 26 (2019) 103508. https://doi.org/10.10 63/1.5122837

    2019

  17. [36]

    Hutchinson, M.M

    D.A.W. Hutchinson, M.M. Turner, R.A. Doyle, M.B. Hopkins, The effects of a small transverse magnetic field upon a capacitively coupled RF discharge, IEEE Trans. Plasma Sci. 23 (1995) 636–643. https://doi.org/10.1109/27.467985

    1995 doi

  18. [37]

    Kushner, Modeling of magnetically enhanced capacitively coupled plasma sources: Ar discharges, J

    M.J. Kushner, Modeling of magnetically enhanced capacitively coupled plasma sources: Ar discharges, J. Appl. Phys. 94 (2003) 1436 –1447. https://doi.org/10.1063/1.1587887

    2003 doi

  19. [38]

    Lieberman, A.J

    M.A. Lieberman, A.J. Lichtenberg, S.E. Savas, Model of magnetically enhanced, capacitive RF discharges, IEEE Trans. Plasma Sci. 19 (1991) 189 –196. https://doi.org/10.1109/27.106813

    1991 doi

  20. [39]

    Vasenkov, M.J

    A.V. Vasenkov, M.J. Kushner, Modeling of magnetically enhanced capacitively coupled plasma sources: Ar/C4F8/O2 discharges, J. Appl. Phys. 95 (2004) 834 –845. https://doi.org/10.1063/1.1633661

    2004 doi

  21. [40]

    You, T.T

    S.J. You, T.T. Hai, M. Park, D.W. Kim, J.H. Kim, D.J. Seong, Y.H. Shin, S.H. Lee, G.Y. Park, J.K. Lee, H.Y. Chang, Role of transverse magnetic field in the capacitive discharge, Thin Solid Films 519 (2011) 6981 –6989. https://doi.org/10.1016/j.tsf.2011 .01.384

    2011 doi

  22. [42]

    Sharma, I.D

    S. Sharma, I.D. Kaganovich, A.V. Khrabrov, P. Kaw, A. Sen, Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field, Phys. Plasmas 25 (2018) 080704. https://doi.org/10.1063/1.5033350

    2018 doi

  23. [43]

    Patil, S

    S. Patil, S. Sharma, S. Sengupta, A. Sen, I. Kaganovich, Electron bounce -cyclotron resonance in capacitive discharges at low magnetic fields, Phys. Rev. Res. 4 (2022) 013059. https://doi.org/10.1103/PhysRevResearch.4.013059

    2022 doi

  24. [44]

    Zhang, J.-Y

    Q.-Z. Zhang, J.-Y. Sun, W.-Q. Lu, J. Schulze, Y.-Q. Guo, Y.-N. Wang, Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron -cyclotron motion, Phys. Rev. E 104 (2021) 045209. https://doi.org/10.1103/PhysRevE.104.04520 9

    2021 doi

  25. [45]

    Sharma, S

    S. Sharma, S. Patil, S. Sengupta, A. Sen, A. Khrabrov, I. Kaganovich, Investigating the effects of electron bounce -cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field, Phys. Plas mas 29 (2022) 063501. ht...

    2022 doi

  26. [46]

    Dahiya, P

    S. Dahiya, P. Singh, Y. Patil, S. Sharma, N. Sirse, S.K. Karkari, Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field, Phys. Plasmas 30 (2023) 093505. https://doi.org/10.1063/5.0160506

    2023 doi

  27. [47]

    K. Bera, S. Rauf, J. Kenney, L. Dorf, K. Collins, Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas, J. Appl. Phys. 107 (2010) 053302. https://doi.org/10.1063/1.3296349

    2010 doi

  28. [48]

    You, H.Y

    S.J. You, H.Y. Chang, Nonlocal to local transition of electron kinetic property in magnetized plasma, Phys. Plasmas 13 (2006) 043503. https://doi.org/10.1063/1.2171654

    2006 doi

  29. [49]

    You, C.W

    S.J. You, C.W. Chung, K.H. Bai, H.Y. Chang, Power dissipation mode transition by a magnetic field, Appl. Phys. Lett. 81 (2002) 2529 –2531. https://doi.org/10.1063/1.1506944

    2002 doi

  30. [50]

    You, S.S

    S.J. You, S.S. Kim, H.Y. Chang, Low energy electron cooling induced by a magnetic field in high pressure capacitive radio frequency discharges, Appl. Phys. Lett. 85 (2004) 4872 –

    2004

  31. [51]

    Turner, D.A.W

    M.M. Turner, D.A.W. Hutchinson, R.A. Doyle, M.B. Hopkins, Heating Mode Transition Induced by a Magnetic Field in a Capacitive rf Discharge, Phys. Rev. Lett. 76 (1996) 2069 –

    1996

  32. [52]

    Joshi, S

    J.K. Joshi, S. Binwal, S.K. Karkari, S. Kumar, Electron series resonance in a magnetized 13.56 MHz symmetric capacitive coupled discharge, J. Appl. Phys. 123 (2018) 113301. https://doi.org/10.1063/1.5009484

    2018 doi

  33. [53]

    Y. Fan, Y. Zou, J. Sun, T. Stirner, D. Wang, Study of the effects of a transverse magnetic field on radio frequency argon discharges by two-dimensional particle-in-cell-Monte-Carlo collision simulations, Phys. Plasmas 20 (2013) 103507. https://doi.org /10.1063/1.4826215

    2013 doi

  34. [54]

    H. Shin, K. Noguchi, X.-Y. Qian, N. Jha, G. Hills, C. Hu, Spatial distributions of thin oxide charging in reactive ion etcher and MERIE etcher, IEEE Electron Device Lett. 14 (1993) 88–90. https://doi.org/10.1109/55.215117

    1993 doi

  35. [55]

    Binwal, Y

    S. Binwal, Y. Patil, S.K. Karkari, L. Nair, Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge, Phys. Plasmas 27 (2020) 033506. https://doi.org/10.1063/1.5118762

    2020 doi

  36. [56]

    Yeom, J.A

    G.Y. Yeom, J.A. Thornton, M.J. Kushner, Cylindrical magnetron discharges. II. The formation of dc bias in rf‐driven discharge sources, J. Appl. Phys. 65 (1989) 3825 –3832. https://doi.org/10.1063/1.343396

    1989 doi

  37. [57]

    Lieberman, S.E

    M.A. Lieberman, S.E. Savas, Bias voltage in finite length, cylindrical and coaxial radio‐ frequency discharges, J. Vac. Sci. Technol. Vac. Surf. Films 8 (1990) 1632 –1641. https://doi.org/10.1116/1.576778

    1990 doi

  38. [58]

    Joshi, S.K

    J.K. Joshi, S.K. Karkari, S. Kumar, Effect of Magnet ization on Impedance Characteristics of a Capacitive Discharge Using Push -Pull Driven Cylindrical Electrodes, IEEE Trans. Plasma Sci. 47 (2019) 5291 –5298. https://doi.org/10.1109/TPS.2019.2952160

    2019

  39. [59]

    Dahiya, P

    S. Dahiya, P. Singh, S. Das, N. Sirse, S.K. Karkari, Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas, Phys. Lett. A 468 (2023) 128745. https://doi.org/10.1016/j.phys leta.2023.128745

    2023

  40. [60]

    Dahiya, N

    S. Dahiya, N. Sharma, S. Geete, S. Sharma, N. Sirse, S. Karkari, Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field, Phys. Plasmas 31 (2024) 0 83512. https://doi.org/10...

    2024 doi

  41. [61]

    Usoltceva, E

    M. Usoltceva, E. Faudot, S. Devaux, S. Heuraux, J. Ledig, G.V. Zadvitskiy, R. Ochoukov, K. Crombé, J.-M. Noterdaeme, Effective collecting area of a cylindrical Langmuir probe in magnetized plasma, Phys. Plasmas 25 (2018) 063518. https://doi.org/10.106 3/1.5028267

    2018

  42. [62]

    Usoltceva, E

    M. Usoltceva, E. Faudot, J. Ledig, S. Devaux, S. Heuraux, G.V. Zadvitskiy, R. Ochoukov, J. Moritz, K. Crombé, J.-M. Noterdaeme, Theory of a cylindrical Langmuir probe parallel to the magnetic field and its calibration with interferometry, Rev. Sci. In strum. 89 (2018) 10J124. ...

    2018 doi

  43. [65]

    Soberón, A.R

    F. Soberón, A.R. Ellingboe, EEDF Measurements in the Diffusion‐extraction Region of a Plasma in ARIS (Applied Radio‐frequency Ion Source), Contrib. Plasma Phys. 44 (2004) 629–634. https://doi.org/10.1002/ctpp.200410093

    2004 doi

  44. [66]

    Crowley, S

    B. Crowley, S. Dietrich, A Langmuir probe system incorporating the Boyd–Twiddy method for EEDF measurement applied to an inductively coupled plasma source, Plasma Sources Sci. Technol. 18 (2009) 014010. https://doi.org/10.1088/0963 -0252/18/1/014010

    2009 doi

  45. [67]

    Trent, A.D

    K.R. Trent, A.D. Gallimore, J.E. Foster, Enhanced method for analyzing Langmuir probe data and characterizing the Electron Energy Distribution Function (EEDF), Phys. Plasmas 26 (2019) 063513. https://doi.org/10.1063/1.5093892

    2019 doi

  46. [68]

    Godyak, Nonequilibrium EEDF in gas discharge plasmas, IEEE Trans

    V.A. Godyak, Nonequilibrium EEDF in gas discharge plasmas, IEEE Trans. Plasma Sci. 34 (2006) 755–766. https://doi.org/10.1109/TPS.2006.875847

    2006

  47. [69]

    Sharma, M

    N. Sharma, M. Chakraborty, N.K. Neog, M. Bandyopadhyay, Design of a helicon plasma source for ion–ion plasma production, Fusion Eng. Des. 117 (2017) 30 –38. https://doi.org/10.1016/j.fusengdes.2017.02.002

    2017 doi

  48. [70]

    Hurlbatt, A.R

    A. Hurlbatt, A.R. Gibson, S. Schröter, J. Bredin, A.P.S. Foote, P. Grondein, D. O’Connell, T. Gans, Concepts, Capabilities, and Limitations of Global Models: A Review, Plasma Process. Polym. 14 (2017) 1600138. https://doi.org/10.1002/ppap.201600138

    2017 doi

  49. [71]

    Lee, M.A

    C. Lee, M.A. Lieberman, Global model of Ar, O 2, Cl 2, and Ar/O 2 high‐density plasma discharges, J. Vac. Sci. Technol. A 13 (1995) 368 –380. https://doi.org/10.1116/1.579366

    1995 doi

  50. [72]

    Lieberman, R.A

    M.A. Lieberman, R.A. Gottscho, Design of High-Density Plasma Sources for Materials Processing, in: M.H. Francombe, J.L. Vossen (Eds.), Phys. Thin Films, Elsevier, 1994: pp. 1–119. https://doi.org/10.1016/B978 -0-08-092513-4.50006-4

    1994 doi

  51. [73]

    Tachibana, Excitation of the 1 s5 ,1s4 , 1s3 , and 1s2 levels of argon by low-energy electrons, Phys

    K. Tachibana, Excitation of the 1 s5 ,1s4 , 1s3 , and 1s2 levels of argon by low-energy electrons, Phys. Rev. A 34 (1986) 1007–1015. https://doi.org/10.1103/PhysRevA.34.1007

    1986 doi

  52. [74]

    Eggarter, Comprehensive optical and collision data for radiation action

    E. Eggarter, Comprehensive optical and collision data for radiation action. II. Ar, J. Chem. Phys. 62 (1975) 833–847. https://doi.org/10.1063/1.430534

    1975 doi

  53. [75]

    Singh, Swati, S.K

    P. Singh, Swati, S.K. Karkari, Equilibrium properties of inhomogeneous partially - magnetized plasma containing negative ions, J. Phys. Appl. Phys. 55 (2022) 235201. https://doi.org/10.1088/1361 -6463/ac585a

    2022 doi

  54. [2072]

    https://doi.org/10.1103/PhysRevLett.76.2069

    doi

  55. [4874]

    https://doi.org/10.1063/1.1805704

    doi

Pith tools

Reviewed August 11, 2026 · model on record in the stance chip above.