A modular probe card system for automated I-V and C-V testing of 16x16 LGAD arrays is described, achieving row-wise scans in ~20 minutes and full pixel scans in ~340 minutes with <1 nA added leakage.
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Development of a system for testing full-size CMS LGAD sensors
A modular probe card system for automated I-V and C-V testing of 16x16 LGAD arrays is described, achieving row-wise scans in ~20 minutes and full pixel scans in ~340 minutes with <1 nA added leakage.