A selective etching process suspends Josephson junction arrays above the substrate, reducing parasitic capacitance by about 74% and increasing inductance by 87% in a fluxonium qubit, without degrading coherence.
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Implementation of scalable suspended superinductors
A selective etching process suspends Josephson junction arrays above the substrate, reducing parasitic capacitance by about 74% and increasing inductance by 87% in a fluxonium qubit, without degrading coherence.