Buried-electrode lithium niobate resonators excite S0 and SH0 lateral bulk acoustic waves, including the first reported overtones of this device class, with measured figures of merit of 437 at 673 MHz.
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Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Buried-electrode lithium niobate resonators excite S0 and SH0 lateral bulk acoustic waves, including the first reported overtones of this device class, with measured figures of merit of 437 at 673 MHz.