Buried-electrode lithium niobate resonators excite S0 and SH0 lateral bulk acoustic waves, including the first reported overtones of this device class, with measured figures of merit of 437 at 673 MHz.
System -Level Analysis of Far -Field Radio Frequency Power Delivery for mm -Sized Sensor Nodes,
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Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Buried-electrode lithium niobate resonators excite S0 and SH0 lateral bulk acoustic waves, including the first reported overtones of this device class, with measured figures of merit of 437 at 673 MHz.