Monolithic 3D stacking of tantala photonics onto lithium niobate enables low-loss interlayer routing and combined second- and third-order nonlinear frequency conversion on a single wafer.
A.et al.Structure and morphology of low mechanical loss TiO 2-doped Ta 2O5.Optical Materials Express10, 1687–1703 (2020)
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Monolithic 3D integration of tantalum pentoxide photonics on arbitrary substrates
Monolithic 3D stacking of tantala photonics onto lithium niobate enables low-loss interlayer routing and combined second- and third-order nonlinear frequency conversion on a single wafer.