The paper presents a systematic Q-EDA architecture and data flow from GDSII to wafer manufacturing for superconducting quantum chips, including nine quantum-specific DRC rules and tool benchmarks.
Fabrication and characterization of aluminum airbridges for superconducting microwave circuits,
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From GDSII to Wafer: EDA Design Flow and Data Conversion for Wafer-Scale Manufacturing of Superconducting Quantum Chips
The paper presents a systematic Q-EDA architecture and data flow from GDSII to wafer manufacturing for superconducting quantum chips, including nine quantum-specific DRC rules and tool benchmarks.