A bimorph lithium niobate PMUT with opposite in-plane polarizations was fabricated and driven to a flexural mode near 1 MHz; the 3.6% coupling figure is from FEA, not from the measured data.
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Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
A bimorph lithium niobate PMUT with opposite in-plane polarizations was fabricated and driven to a flexural mode near 1 MHz; the 3.6% coupling figure is from FEA, not from the measured data.